2/1/2011	9:36:46 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/1/2011	9:36:46 AM	Recipe started at 9:36 AM
2/1/2011	9:36:46 AM	H2 valve closed
2/1/2011	9:36:46 AM	BCl3 valve closed
2/1/2011	9:36:46 AM	PH3 valve closed
2/1/2011	9:36:46 AM	SiCl4 pre valve closed
2/1/2011	9:36:46 AM	SiCl4 post valve closed
2/1/2011	9:36:46 AM	Main Vac valve closed
2/1/2011	9:36:46 AM	Bypass valve closed
2/1/2011	9:36:46 AM	Bubbler valve closed
2/1/2011	9:36:46 AM	Helium valve opened
2/1/2011	9:36:46 AM	Helium MFC set to  500.000000
2/1/2011	9:36:46 AM	H2 MFC set to  0.000000
2/1/2011	9:36:46 AM	BCl3 MFC set to  0.000000
2/1/2011	9:36:46 AM	PHl3 MFC set to  0.000000
2/1/2011	9:36:46 AM	SiCl4 MFC set to  0.000000
2/1/2011	9:36:46 AM	Bypass solenoid MFC set to  0.000000
2/1/2011	9:36:46 AM	Tube furnace set to 0
2/1/2011	9:38:05 AM	Helium valve closed
2/1/2011	9:38:05 AM	H2 valve closed
2/1/2011	9:38:05 AM	BCl3 valve closed
2/1/2011	9:38:05 AM	PH3 valve closed
2/1/2011	9:38:05 AM	SiCl4 pre valve closed
2/1/2011	9:38:05 AM	SiCl4 post valve closed
2/1/2011	9:38:05 AM	Main Vac valve closed
2/1/2011	9:38:05 AM	Bypass valve closed
2/1/2011	9:38:05 AM	Bubbler valve closed
2/1/2011	9:38:05 AM	Helium MFC set to  0.000000
2/1/2011	9:38:05 AM	H2 MFC set to  0.000000
2/1/2011	9:38:05 AM	BCl3 MFC set to  0.000000
2/1/2011	9:38:05 AM	PHl3 MFC set to  0.000000
2/1/2011	9:38:05 AM	SiCl4 MFC set to  0.000000
2/1/2011	9:38:05 AM	Bypass solenoid MFC set to  0.000000
2/1/2011	9:38:06 AM	Tube furnace set to 0
2/1/2011	9:38:06 AM	Run finished at 9:38 AM
2/1/2011	9:38:06 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/1/2011	9:43:42 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
2/1/2011	9:43:54 AM	Recipe started at 9:43 AM
2/1/2011	9:43:54 AM	Helium valve closed
2/1/2011	9:43:54 AM	H2 valve closed
2/1/2011	9:43:54 AM	BCl3 valve closed
2/1/2011	9:43:54 AM	PH3 valve closed
2/1/2011	9:43:54 AM	SiCl4 pre valve closed
2/1/2011	9:43:54 AM	SiCl4 post valve closed
2/1/2011	9:43:54 AM	Main Vac valve closed
2/1/2011	9:43:54 AM	Bubbler valve closed
2/1/2011	9:43:54 AM	Bypass valve opened
2/1/2011	9:43:54 AM	Helium MFC set to  0.000000
2/1/2011	9:43:54 AM	H2 MFC set to  0.000000
2/1/2011	9:43:54 AM	BCl3 MFC set to  0.000000
2/1/2011	9:43:54 AM	PHl3 MFC set to  0.000000
2/1/2011	9:43:54 AM	SiCl4 MFC set to  0.000000
2/1/2011	9:43:54 AM	Bypass solenoid MFC set to  0.000000
2/1/2011	9:43:54 AM	Tube furnace set to 0
2/1/2011	9:44:25 AM	Helium valve closed
2/1/2011	9:44:25 AM	H2 valve closed
2/1/2011	9:44:25 AM	BCl3 valve closed
2/1/2011	9:44:25 AM	PH3 valve closed
2/1/2011	9:44:25 AM	SiCl4 pre valve closed
2/1/2011	9:44:25 AM	SiCl4 post valve closed
2/1/2011	9:44:25 AM	Bubbler valve closed
2/1/2011	9:44:25 AM	Main Vac valve opened
2/1/2011	9:44:25 AM	Bypass valve opened
2/1/2011	9:44:25 AM	Helium MFC set to  0.000000
2/1/2011	9:44:25 AM	H2 MFC set to  0.000000
2/1/2011	9:44:25 AM	BCl3 MFC set to  0.000000
2/1/2011	9:44:25 AM	PHl3 MFC set to  0.000000
2/1/2011	9:44:25 AM	SiCl4 MFC set to  0.000000
2/1/2011	9:44:25 AM	Bypass solenoid MFC set to  0.000000
2/1/2011	9:44:25 AM	Tube furnace set to 0
2/1/2011	9:45:25 AM	H2 valve closed
2/1/2011	9:45:26 AM	BCl3 valve closed
2/1/2011	9:45:26 AM	PH3 valve closed
2/1/2011	9:45:26 AM	SiCl4 pre valve closed
2/1/2011	9:45:26 AM	SiCl4 post valve closed
2/1/2011	9:45:26 AM	Bubbler valve closed
2/1/2011	9:45:26 AM	Helium valve opened
2/1/2011	9:45:26 AM	Main Vac valve opened
2/1/2011	9:45:26 AM	Bypass valve opened
2/1/2011	9:45:26 AM	Helium MFC set to  100.000000
2/1/2011	9:45:26 AM	H2 MFC set to  0.000000
2/1/2011	9:45:26 AM	BCl3 MFC set to  0.000000
2/1/2011	9:45:26 AM	PHl3 MFC set to  0.000000
2/1/2011	9:45:26 AM	SiCl4 MFC set to  0.000000
2/1/2011	9:45:26 AM	Bypass solenoid MFC set to  0.000000
2/1/2011	9:45:26 AM	Tube furnace set to 0
2/1/2011	9:46:26 AM	Helium valve closed
2/1/2011	9:46:26 AM	H2 valve closed
2/1/2011	9:46:26 AM	BCl3 valve closed
2/1/2011	9:46:26 AM	PH3 valve closed
2/1/2011	9:46:26 AM	SiCl4 pre valve closed
2/1/2011	9:46:26 AM	SiCl4 post valve closed
2/1/2011	9:46:26 AM	Bubbler valve closed
2/1/2011	9:46:26 AM	Main Vac valve opened
2/1/2011	9:46:26 AM	Bypass valve opened
2/1/2011	9:46:26 AM	Helium MFC set to  0.000000
2/1/2011	9:46:26 AM	H2 MFC set to  0.000000
2/1/2011	9:46:26 AM	BCl3 MFC set to  0.000000
2/1/2011	9:46:26 AM	PHl3 MFC set to  0.000000
2/1/2011	9:46:26 AM	SiCl4 MFC set to  0.000000
2/1/2011	9:46:26 AM	Bypass solenoid MFC set to  0.000000
2/1/2011	9:46:26 AM	Tube furnace set to 0
2/1/2011	9:47:26 AM	H2 valve closed
2/1/2011	9:47:26 AM	BCl3 valve closed
2/1/2011	9:47:26 AM	PH3 valve closed
2/1/2011	9:47:26 AM	SiCl4 pre valve closed
2/1/2011	9:47:26 AM	SiCl4 post valve closed
2/1/2011	9:47:26 AM	Bubbler valve closed
2/1/2011	9:47:26 AM	Helium valve opened
2/1/2011	9:47:26 AM	Main Vac valve opened
2/1/2011	9:47:26 AM	Bypass valve opened
2/1/2011	9:47:26 AM	Helium MFC set to  100.000000
2/1/2011	9:47:26 AM	H2 MFC set to  0.000000
2/1/2011	9:47:26 AM	BCl3 MFC set to  0.000000
2/1/2011	9:47:26 AM	PHl3 MFC set to  0.000000
2/1/2011	9:47:26 AM	SiCl4 MFC set to  0.000000
2/1/2011	9:47:26 AM	Bypass solenoid MFC set to  0.000000
2/1/2011	9:47:26 AM	Tube furnace set to 0
2/1/2011	9:48:26 AM	Helium valve closed
2/1/2011	9:48:26 AM	H2 valve closed
2/1/2011	9:48:26 AM	BCl3 valve closed
2/1/2011	9:48:26 AM	PH3 valve closed
2/1/2011	9:48:26 AM	SiCl4 pre valve closed
2/1/2011	9:48:26 AM	SiCl4 post valve closed
2/1/2011	9:48:26 AM	Bubbler valve closed
2/1/2011	9:48:26 AM	Main Vac valve opened
2/1/2011	9:48:26 AM	Bypass valve opened
2/1/2011	9:48:26 AM	Helium MFC set to  0.000000
2/1/2011	9:48:26 AM	H2 MFC set to  0.000000
2/1/2011	9:48:26 AM	BCl3 MFC set to  0.000000
2/1/2011	9:48:26 AM	PHl3 MFC set to  0.000000
2/1/2011	9:48:26 AM	SiCl4 MFC set to  0.000000
2/1/2011	9:48:26 AM	Bypass solenoid MFC set to  0.000000
2/1/2011	9:48:26 AM	Tube furnace set to 0
2/1/2011	9:49:26 AM	H2 valve closed
2/1/2011	9:49:26 AM	BCl3 valve closed
2/1/2011	9:49:26 AM	PH3 valve closed
2/1/2011	9:49:26 AM	SiCl4 pre valve closed
2/1/2011	9:49:26 AM	SiCl4 post valve closed
2/1/2011	9:49:26 AM	Bubbler valve closed
2/1/2011	9:49:26 AM	Helium valve opened
2/1/2011	9:49:26 AM	Main Vac valve opened
2/1/2011	9:49:26 AM	Bypass valve opened
2/1/2011	9:49:26 AM	Helium MFC set to  100.000000
2/1/2011	9:49:26 AM	H2 MFC set to  0.000000
2/1/2011	9:49:26 AM	BCl3 MFC set to  0.000000
2/1/2011	9:49:26 AM	PHl3 MFC set to  0.000000
2/1/2011	9:49:26 AM	SiCl4 MFC set to  0.000000
2/1/2011	9:49:26 AM	Bypass solenoid MFC set to  0.000000
2/1/2011	9:49:26 AM	Tube furnace set to 0
2/1/2011	9:50:26 AM	Helium valve closed
2/1/2011	9:50:26 AM	H2 valve closed
2/1/2011	9:50:26 AM	BCl3 valve closed
2/1/2011	9:50:26 AM	PH3 valve closed
2/1/2011	9:50:26 AM	SiCl4 pre valve closed
2/1/2011	9:50:26 AM	SiCl4 post valve closed
2/1/2011	9:50:26 AM	Bubbler valve closed
2/1/2011	9:50:26 AM	Main Vac valve opened
2/1/2011	9:50:26 AM	Bypass valve opened
2/1/2011	9:50:26 AM	Helium MFC set to  0.000000
2/1/2011	9:50:26 AM	H2 MFC set to  0.000000
2/1/2011	9:50:26 AM	BCl3 MFC set to  0.000000
2/1/2011	9:50:27 AM	PHl3 MFC set to  0.000000
2/1/2011	9:50:27 AM	SiCl4 MFC set to  0.000000
2/1/2011	9:50:27 AM	Bypass solenoid MFC set to  0.000000
2/1/2011	9:50:27 AM	Tube furnace set to 0
2/1/2011	9:51:27 AM	H2 valve closed
2/1/2011	9:51:27 AM	BCl3 valve closed
2/1/2011	9:51:27 AM	PH3 valve closed
2/1/2011	9:51:27 AM	SiCl4 pre valve closed
2/1/2011	9:51:27 AM	SiCl4 post valve closed
2/1/2011	9:51:27 AM	Bubbler valve closed
2/1/2011	9:51:27 AM	Helium valve opened
2/1/2011	9:51:27 AM	Main Vac valve opened
2/1/2011	9:51:27 AM	Bypass valve opened
2/1/2011	9:51:27 AM	Helium MFC set to  100.000000
2/1/2011	9:51:27 AM	H2 MFC set to  0.000000
2/1/2011	9:51:27 AM	BCl3 MFC set to  0.000000
2/1/2011	9:51:27 AM	PHl3 MFC set to  0.000000
2/1/2011	9:51:27 AM	SiCl4 MFC set to  0.000000
2/1/2011	9:51:27 AM	Bypass solenoid MFC set to  0.000000
2/1/2011	9:51:27 AM	Tube furnace set to 0
2/1/2011	9:52:27 AM	Helium valve closed
2/1/2011	9:52:27 AM	H2 valve closed
2/1/2011	9:52:27 AM	BCl3 valve closed
2/1/2011	9:52:27 AM	PH3 valve closed
2/1/2011	9:52:27 AM	SiCl4 pre valve closed
2/1/2011	9:52:27 AM	SiCl4 post valve closed
2/1/2011	9:52:27 AM	Bubbler valve closed
2/1/2011	9:52:27 AM	Main Vac valve opened
2/1/2011	9:52:27 AM	Bypass valve opened
2/1/2011	9:52:27 AM	Helium MFC set to  0.000000
2/1/2011	9:52:27 AM	H2 MFC set to  0.000000
2/1/2011	9:52:27 AM	BCl3 MFC set to  0.000000
2/1/2011	9:52:27 AM	PHl3 MFC set to  0.000000
2/1/2011	9:52:27 AM	SiCl4 MFC set to  0.000000
2/1/2011	9:52:27 AM	Bypass solenoid MFC set to  0.000000
2/1/2011	9:52:27 AM	Tube furnace set to 0
2/1/2011	9:53:27 AM	H2 valve closed
2/1/2011	9:53:27 AM	BCl3 valve closed
2/1/2011	9:53:27 AM	PH3 valve closed
2/1/2011	9:53:27 AM	SiCl4 pre valve closed
2/1/2011	9:53:27 AM	SiCl4 post valve closed
2/1/2011	9:53:27 AM	Bubbler valve closed
2/1/2011	9:53:27 AM	Helium valve opened
2/1/2011	9:53:27 AM	Main Vac valve opened
2/1/2011	9:53:27 AM	Bypass valve opened
2/1/2011	9:53:27 AM	Helium MFC set to  100.000000
2/1/2011	9:53:27 AM	H2 MFC set to  0.000000
2/1/2011	9:53:27 AM	BCl3 MFC set to  0.000000
2/1/2011	9:53:27 AM	PHl3 MFC set to  0.000000
2/1/2011	9:53:27 AM	SiCl4 MFC set to  0.000000
2/1/2011	9:53:27 AM	Bypass solenoid MFC set to  0.000000
2/1/2011	9:53:27 AM	Tube furnace set to 0
2/1/2011	9:54:27 AM	Helium valve closed
2/1/2011	9:54:27 AM	H2 valve closed
2/1/2011	9:54:27 AM	BCl3 valve closed
2/1/2011	9:54:27 AM	PH3 valve closed
2/1/2011	9:54:27 AM	SiCl4 pre valve closed
2/1/2011	9:54:27 AM	SiCl4 post valve closed
2/1/2011	9:54:27 AM	Bubbler valve closed
2/1/2011	9:54:27 AM	Main Vac valve opened
2/1/2011	9:54:27 AM	Bypass valve opened
2/1/2011	9:54:27 AM	Helium MFC set to  0.000000
2/1/2011	9:54:27 AM	H2 MFC set to  0.000000
2/1/2011	9:54:27 AM	BCl3 MFC set to  0.000000
2/1/2011	9:54:27 AM	PHl3 MFC set to  0.000000
2/1/2011	9:54:27 AM	SiCl4 MFC set to  0.000000
2/1/2011	9:54:27 AM	Bypass solenoid MFC set to  0.000000
2/1/2011	9:54:27 AM	Tube furnace set to 0
2/1/2011	9:55:27 AM	H2 valve closed
2/1/2011	9:55:27 AM	BCl3 valve closed
2/1/2011	9:55:27 AM	PH3 valve closed
2/1/2011	9:55:27 AM	SiCl4 pre valve closed
2/1/2011	9:55:27 AM	SiCl4 post valve closed
2/1/2011	9:55:27 AM	Bubbler valve closed
2/1/2011	9:55:27 AM	Helium valve opened
2/1/2011	9:55:27 AM	Main Vac valve opened
2/1/2011	9:55:27 AM	Bypass valve opened
2/1/2011	9:55:27 AM	Helium MFC set to  100.000000
2/1/2011	9:55:27 AM	H2 MFC set to  0.000000
2/1/2011	9:55:27 AM	BCl3 MFC set to  0.000000
2/1/2011	9:55:27 AM	PHl3 MFC set to  0.000000
2/1/2011	9:55:27 AM	SiCl4 MFC set to  0.000000
2/1/2011	9:55:27 AM	Bypass solenoid MFC set to  0.000000
2/1/2011	9:55:28 AM	Tube furnace set to 0
2/1/2011	9:56:28 AM	Helium valve closed
2/1/2011	9:56:28 AM	H2 valve closed
2/1/2011	9:56:28 AM	BCl3 valve closed
2/1/2011	9:56:28 AM	PH3 valve closed
2/1/2011	9:56:28 AM	SiCl4 pre valve closed
2/1/2011	9:56:28 AM	SiCl4 post valve closed
2/1/2011	9:56:28 AM	Bubbler valve closed
2/1/2011	9:56:28 AM	Main Vac valve opened
2/1/2011	9:56:28 AM	Bypass valve opened
2/1/2011	9:56:28 AM	Helium MFC set to  0.000000
2/1/2011	9:56:28 AM	H2 MFC set to  0.000000
2/1/2011	9:56:28 AM	BCl3 MFC set to  0.000000
2/1/2011	9:56:28 AM	PHl3 MFC set to  0.000000
2/1/2011	9:56:28 AM	SiCl4 MFC set to  0.000000
2/1/2011	9:56:28 AM	Bypass solenoid MFC set to  0.000000
2/1/2011	9:56:28 AM	Tube furnace set to 0
2/1/2011	9:57:28 AM	H2 valve closed
2/1/2011	9:57:28 AM	BCl3 valve closed
2/1/2011	9:57:28 AM	PH3 valve closed
2/1/2011	9:57:28 AM	SiCl4 pre valve closed
2/1/2011	9:57:28 AM	SiCl4 post valve closed
2/1/2011	9:57:28 AM	Bubbler valve closed
2/1/2011	9:57:28 AM	Helium valve opened
2/1/2011	9:57:28 AM	Main Vac valve opened
2/1/2011	9:57:28 AM	Bypass valve opened
2/1/2011	9:57:28 AM	Helium MFC set to  100.000000
2/1/2011	9:57:28 AM	H2 MFC set to  0.000000
2/1/2011	9:57:28 AM	BCl3 MFC set to  0.000000
2/1/2011	9:57:28 AM	PHl3 MFC set to  0.000000
2/1/2011	9:57:28 AM	SiCl4 MFC set to  0.000000
2/1/2011	9:57:28 AM	Bypass solenoid MFC set to  0.000000
2/1/2011	9:57:28 AM	Tube furnace set to 0
2/1/2011	9:58:28 AM	Helium valve closed
2/1/2011	9:58:28 AM	H2 valve closed
2/1/2011	9:58:28 AM	BCl3 valve closed
2/1/2011	9:58:28 AM	PH3 valve closed
2/1/2011	9:58:28 AM	SiCl4 pre valve closed
2/1/2011	9:58:28 AM	SiCl4 post valve closed
2/1/2011	9:58:28 AM	Bubbler valve closed
2/1/2011	9:58:28 AM	Main Vac valve opened
2/1/2011	9:58:28 AM	Bypass valve opened
2/1/2011	9:58:28 AM	Helium MFC set to  0.000000
2/1/2011	9:58:28 AM	H2 MFC set to  0.000000
2/1/2011	9:58:28 AM	BCl3 MFC set to  0.000000
2/1/2011	9:58:28 AM	PHl3 MFC set to  0.000000
2/1/2011	9:58:28 AM	SiCl4 MFC set to  0.000000
2/1/2011	9:58:28 AM	Bypass solenoid MFC set to  0.000000
2/1/2011	9:58:28 AM	Tube furnace set to 0
2/1/2011	9:59:28 AM	H2 valve closed
2/1/2011	9:59:28 AM	BCl3 valve closed
2/1/2011	9:59:28 AM	PH3 valve closed
2/1/2011	9:59:28 AM	SiCl4 pre valve closed
2/1/2011	9:59:28 AM	SiCl4 post valve closed
2/1/2011	9:59:28 AM	Bubbler valve closed
2/1/2011	9:59:28 AM	Helium valve opened
2/1/2011	9:59:28 AM	Main Vac valve opened
2/1/2011	9:59:28 AM	Bypass valve opened
2/1/2011	9:59:28 AM	Helium MFC set to  100.000000
2/1/2011	9:59:28 AM	H2 MFC set to  0.000000
2/1/2011	9:59:28 AM	BCl3 MFC set to  0.000000
2/1/2011	9:59:28 AM	PHl3 MFC set to  0.000000
2/1/2011	9:59:28 AM	SiCl4 MFC set to  0.000000
2/1/2011	9:59:28 AM	Bypass solenoid MFC set to  0.000000
2/1/2011	9:59:28 AM	Tube furnace set to 0
2/1/2011	10:00:28 AM	Helium valve closed
2/1/2011	10:00:28 AM	H2 valve closed
2/1/2011	10:00:28 AM	BCl3 valve closed
2/1/2011	10:00:28 AM	PH3 valve closed
2/1/2011	10:00:28 AM	SiCl4 pre valve closed
2/1/2011	10:00:28 AM	SiCl4 post valve closed
2/1/2011	10:00:28 AM	Bubbler valve closed
2/1/2011	10:00:28 AM	Main Vac valve opened
2/1/2011	10:00:28 AM	Bypass valve opened
2/1/2011	10:00:28 AM	Helium MFC set to  0.000000
2/1/2011	10:00:28 AM	H2 MFC set to  0.000000
2/1/2011	10:00:28 AM	BCl3 MFC set to  0.000000
2/1/2011	10:00:28 AM	PHl3 MFC set to  0.000000
2/1/2011	10:00:28 AM	SiCl4 MFC set to  0.000000
2/1/2011	10:00:28 AM	Bypass solenoid MFC set to  0.000000
2/1/2011	10:00:29 AM	Tube furnace set to 0
2/1/2011	10:01:29 AM	H2 valve closed
2/1/2011	10:01:29 AM	BCl3 valve closed
2/1/2011	10:01:29 AM	PH3 valve closed
2/1/2011	10:01:29 AM	SiCl4 pre valve closed
2/1/2011	10:01:29 AM	SiCl4 post valve closed
2/1/2011	10:01:29 AM	Bubbler valve closed
2/1/2011	10:01:29 AM	Helium valve opened
2/1/2011	10:01:29 AM	Main Vac valve opened
2/1/2011	10:01:29 AM	Bypass valve opened
2/1/2011	10:01:29 AM	Helium MFC set to  100.000000
2/1/2011	10:01:29 AM	H2 MFC set to  0.000000
2/1/2011	10:01:29 AM	BCl3 MFC set to  0.000000
2/1/2011	10:01:29 AM	PHl3 MFC set to  0.000000
2/1/2011	10:01:29 AM	SiCl4 MFC set to  0.000000
2/1/2011	10:01:29 AM	Bypass solenoid MFC set to  0.000000
2/1/2011	10:01:29 AM	Tube furnace set to 0
2/1/2011	10:02:29 AM	Helium valve closed
2/1/2011	10:02:29 AM	H2 valve closed
2/1/2011	10:02:29 AM	BCl3 valve closed
2/1/2011	10:02:29 AM	PH3 valve closed
2/1/2011	10:02:29 AM	SiCl4 pre valve closed
2/1/2011	10:02:29 AM	SiCl4 post valve closed
2/1/2011	10:02:29 AM	Bubbler valve closed
2/1/2011	10:02:29 AM	Main Vac valve opened
2/1/2011	10:02:29 AM	Bypass valve opened
2/1/2011	10:02:29 AM	Helium MFC set to  0.000000
2/1/2011	10:02:29 AM	H2 MFC set to  0.000000
2/1/2011	10:02:29 AM	BCl3 MFC set to  0.000000
2/1/2011	10:02:29 AM	PHl3 MFC set to  0.000000
2/1/2011	10:02:29 AM	SiCl4 MFC set to  0.000000
2/1/2011	10:02:29 AM	Bypass solenoid MFC set to  0.000000
2/1/2011	10:02:29 AM	Tube furnace set to 0
2/1/2011	10:03:29 AM	H2 valve closed
2/1/2011	10:03:29 AM	BCl3 valve closed
2/1/2011	10:03:29 AM	PH3 valve closed
2/1/2011	10:03:29 AM	SiCl4 pre valve closed
2/1/2011	10:03:29 AM	SiCl4 post valve closed
2/1/2011	10:03:29 AM	Bubbler valve closed
2/1/2011	10:03:29 AM	Helium valve opened
2/1/2011	10:03:29 AM	Main Vac valve opened
2/1/2011	10:03:29 AM	Bypass valve opened
2/1/2011	10:03:29 AM	Helium MFC set to  100.000000
2/1/2011	10:03:29 AM	H2 MFC set to  0.000000
2/1/2011	10:03:29 AM	BCl3 MFC set to  0.000000
2/1/2011	10:03:29 AM	PHl3 MFC set to  0.000000
2/1/2011	10:03:29 AM	SiCl4 MFC set to  0.000000
2/1/2011	10:03:29 AM	Bypass solenoid MFC set to  0.000000
2/1/2011	10:03:29 AM	Tube furnace set to 0
2/1/2011	10:04:29 AM	Helium valve closed
2/1/2011	10:04:29 AM	H2 valve closed
2/1/2011	10:04:29 AM	BCl3 valve closed
2/1/2011	10:04:29 AM	PH3 valve closed
2/1/2011	10:04:29 AM	SiCl4 pre valve closed
2/1/2011	10:04:29 AM	SiCl4 post valve closed
2/1/2011	10:04:29 AM	Bubbler valve closed
2/1/2011	10:04:29 AM	Main Vac valve opened
2/1/2011	10:04:29 AM	Bypass valve opened
2/1/2011	10:04:29 AM	Helium MFC set to  0.000000
2/1/2011	10:04:29 AM	H2 MFC set to  0.000000
2/1/2011	10:04:29 AM	BCl3 MFC set to  0.000000
2/1/2011	10:04:29 AM	PHl3 MFC set to  0.000000
2/1/2011	10:04:29 AM	SiCl4 MFC set to  0.000000
2/1/2011	10:04:29 AM	Bypass solenoid MFC set to  0.000000
2/1/2011	10:04:29 AM	Tube furnace set to 0
2/1/2011	10:04:30 AM	Run finished at 10:04 AM
2/1/2011	10:04:30 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
2/1/2011	10:35:57 AM	Recipe started at 10:35 AM
2/1/2011	10:35:57 AM	Helium valve closed
2/1/2011	10:35:57 AM	BCl3 valve closed
2/1/2011	10:35:57 AM	PH3 valve closed
2/1/2011	10:35:57 AM	SiCl4 pre valve closed
2/1/2011	10:35:57 AM	SiCl4 post valve closed
2/1/2011	10:35:57 AM	Main Vac valve closed
2/1/2011	10:35:57 AM	Bypass valve closed
2/1/2011	10:35:57 AM	Bubbler valve closed
2/1/2011	10:35:57 AM	H2 valve opened
2/1/2011	10:35:57 AM	Helium MFC set to  0.000000
2/1/2011	10:35:57 AM	H2 MFC set to  500.000000
2/1/2011	10:35:57 AM	BCl3 MFC set to  0.000000
2/1/2011	10:35:57 AM	PHl3 MFC set to  0.000000
2/1/2011	10:35:57 AM	SiCl4 MFC set to  0.000000
2/1/2011	10:35:57 AM	Bypass solenoid MFC set to  0.000000
2/1/2011	10:35:57 AM	Tube furnace set to 200
2/1/2011	10:37:17 AM	Helium valve closed
2/1/2011	10:37:17 AM	BCl3 valve closed
2/1/2011	10:37:17 AM	PH3 valve closed
2/1/2011	10:37:17 AM	SiCl4 pre valve closed
2/1/2011	10:37:17 AM	SiCl4 post valve closed
2/1/2011	10:37:17 AM	Main Vac valve closed
2/1/2011	10:37:17 AM	Bypass valve closed
2/1/2011	10:37:17 AM	H2 valve opened
2/1/2011	10:37:17 AM	Bubbler valve opened
2/1/2011	10:37:17 AM	Helium MFC set to  0.000000
2/1/2011	10:37:17 AM	H2 MFC set to  400.000000
2/1/2011	10:37:17 AM	BCl3 MFC set to  0.000000
2/1/2011	10:37:17 AM	PHl3 MFC set to  0.000000
2/1/2011	10:37:17 AM	SiCl4 MFC set to  0.000000
2/1/2011	10:37:17 AM	Bypass solenoid MFC set to  0.000000
2/1/2011	10:37:18 AM	Tube furnace set to 1002
2/1/2011	10:53:18 AM	Helium valve closed
2/1/2011	10:53:18 AM	BCl3 valve closed
2/1/2011	10:53:18 AM	PH3 valve closed
2/1/2011	10:53:18 AM	SiCl4 pre valve closed
2/1/2011	10:53:18 AM	SiCl4 post valve closed
2/1/2011	10:53:18 AM	Main Vac valve closed
2/1/2011	10:53:18 AM	Bypass valve closed
2/1/2011	10:53:18 AM	H2 valve opened
2/1/2011	10:53:18 AM	Bubbler valve opened
2/1/2011	10:53:18 AM	Helium MFC set to  0.000000
2/1/2011	10:53:18 AM	H2 MFC set to  400.000000
2/1/2011	10:53:18 AM	BCl3 MFC set to  0.000000
2/1/2011	10:53:18 AM	PHl3 MFC set to  0.000000
2/1/2011	10:53:18 AM	SiCl4 MFC set to  0.000000
2/1/2011	10:53:18 AM	Bypass solenoid MFC set to  0.000000
2/1/2011	10:53:18 AM	Tube furnace set to 1000
2/1/2011	10:58:18 AM	Helium valve closed
2/1/2011	10:58:18 AM	PH3 valve closed
2/1/2011	10:58:18 AM	Main Vac valve closed
2/1/2011	10:58:18 AM	Bypass valve closed
2/1/2011	10:58:18 AM	H2 valve opened
2/1/2011	10:58:18 AM	BCl3 valve opened
2/1/2011	10:58:18 AM	SiCl4 pre valve opened
2/1/2011	10:58:18 AM	SiCl4 post valve opened
2/1/2011	10:58:18 AM	Bubbler valve opened
2/1/2011	10:58:18 AM	Helium MFC set to  0.000000
2/1/2011	10:58:18 AM	H2 MFC set to  400.000000
2/1/2011	10:58:18 AM	BCl3 MFC set to  3.200000
2/1/2011	10:58:18 AM	PHl3 MFC set to  0.000000
2/1/2011	10:58:18 AM	SiCl4 MFC set to  40.000000
2/1/2011	10:58:18 AM	Bypass solenoid MFC set to  0.000000
2/1/2011	10:58:18 AM	Tube furnace set to 1000
2/1/2011	11:16:18 AM	Helium valve closed
2/1/2011	11:16:18 AM	BCl3 valve closed
2/1/2011	11:16:18 AM	PH3 valve closed
2/1/2011	11:16:18 AM	SiCl4 pre valve closed
2/1/2011	11:16:18 AM	SiCl4 post valve closed
2/1/2011	11:16:18 AM	Main Vac valve closed
2/1/2011	11:16:18 AM	Bypass valve closed
2/1/2011	11:16:18 AM	H2 valve opened
2/1/2011	11:16:18 AM	Bubbler valve opened
2/1/2011	11:16:18 AM	Helium MFC set to  0.000000
2/1/2011	11:16:18 AM	H2 MFC set to  500.000000
2/1/2011	11:16:18 AM	BCl3 MFC set to  0.000000
2/1/2011	11:16:18 AM	PHl3 MFC set to  0.000000
2/1/2011	11:16:18 AM	SiCl4 MFC set to  0.000000
2/1/2011	11:16:18 AM	Bypass solenoid MFC set to  0.000000
2/1/2011	11:16:18 AM	Tube furnace set to 0
2/1/2011	11:16:38 AM	H2 valve closed
2/1/2011	11:16:38 AM	BCl3 valve closed
2/1/2011	11:16:38 AM	PH3 valve closed
2/1/2011	11:16:38 AM	SiCl4 pre valve closed
2/1/2011	11:16:38 AM	SiCl4 post valve closed
2/1/2011	11:16:38 AM	Main Vac valve closed
2/1/2011	11:16:38 AM	Bypass valve closed
2/1/2011	11:16:38 AM	Helium valve opened
2/1/2011	11:16:38 AM	Bubbler valve opened
2/1/2011	11:16:38 AM	Helium MFC set to  400.000000
2/1/2011	11:16:38 AM	H2 MFC set to  0.000000
2/1/2011	11:16:38 AM	BCl3 MFC set to  0.000000
2/1/2011	11:16:38 AM	PHl3 MFC set to  0.000000
2/1/2011	11:16:38 AM	SiCl4 MFC set to  0.000000
2/1/2011	11:16:38 AM	Bypass solenoid MFC set to  0.000000
2/1/2011	11:16:38 AM	Tube furnace set to 0
2/1/2011	11:36:38 AM	Helium valve closed
2/1/2011	11:36:38 AM	H2 valve closed
2/1/2011	11:36:38 AM	BCl3 valve closed
2/1/2011	11:36:38 AM	PH3 valve closed
2/1/2011	11:36:38 AM	SiCl4 pre valve closed
2/1/2011	11:36:38 AM	SiCl4 post valve closed
2/1/2011	11:36:38 AM	Main Vac valve closed
2/1/2011	11:36:38 AM	Bypass valve closed
2/1/2011	11:36:38 AM	Bubbler valve closed
2/1/2011	11:36:38 AM	Helium MFC set to  0.000000
2/1/2011	11:36:38 AM	H2 MFC set to  0.000000
2/1/2011	11:36:38 AM	BCl3 MFC set to  0.000000
2/1/2011	11:36:38 AM	PHl3 MFC set to  0.000000
2/1/2011	11:36:38 AM	SiCl4 MFC set to  0.000000
2/1/2011	11:36:38 AM	Bypass solenoid MFC set to  0.000000
2/1/2011	11:36:38 AM	Tube furnace set to 0
2/1/2011	11:36:39 AM	Run finished at 11:36 AM
2/1/2011	11:47:08 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
2/1/2011	11:47:21 AM	Recipe started at 11:47 AM
2/1/2011	11:47:21 AM	Helium valve closed
2/1/2011	11:47:21 AM	H2 valve closed
2/1/2011	11:47:21 AM	BCl3 valve closed
2/1/2011	11:47:21 AM	PH3 valve closed
2/1/2011	11:47:21 AM	SiCl4 pre valve closed
2/1/2011	11:47:21 AM	SiCl4 post valve closed
2/1/2011	11:47:21 AM	Main Vac valve closed
2/1/2011	11:47:21 AM	Bubbler valve closed
2/1/2011	11:47:21 AM	Bypass valve opened
2/1/2011	11:47:21 AM	Helium MFC set to  0.000000
2/1/2011	11:47:21 AM	H2 MFC set to  0.000000
2/1/2011	11:47:21 AM	BCl3 MFC set to  0.000000
2/1/2011	11:47:21 AM	PHl3 MFC set to  0.000000
2/1/2011	11:47:21 AM	SiCl4 MFC set to  0.000000
2/1/2011	11:47:21 AM	Bypass solenoid MFC set to  0.000000
2/1/2011	11:47:21 AM	Tube furnace set to 0
2/1/2011	11:47:53 AM	Helium valve closed
2/1/2011	11:47:53 AM	H2 valve closed
2/1/2011	11:47:53 AM	BCl3 valve closed
2/1/2011	11:47:53 AM	PH3 valve closed
2/1/2011	11:47:53 AM	SiCl4 pre valve closed
2/1/2011	11:47:53 AM	SiCl4 post valve closed
2/1/2011	11:47:53 AM	Bubbler valve closed
2/1/2011	11:47:53 AM	Main Vac valve opened
2/1/2011	11:47:53 AM	Bypass valve opened
2/1/2011	11:47:53 AM	Helium MFC set to  0.000000
2/1/2011	11:47:53 AM	H2 MFC set to  0.000000
2/1/2011	11:47:53 AM	BCl3 MFC set to  0.000000
2/1/2011	11:47:53 AM	PHl3 MFC set to  0.000000
2/1/2011	11:47:53 AM	SiCl4 MFC set to  0.000000
2/1/2011	11:47:53 AM	Bypass solenoid MFC set to  0.000000
2/1/2011	11:47:53 AM	Tube furnace set to 0
2/1/2011	11:48:53 AM	H2 valve closed
2/1/2011	11:48:53 AM	BCl3 valve closed
2/1/2011	11:48:53 AM	PH3 valve closed
2/1/2011	11:48:53 AM	SiCl4 pre valve closed
2/1/2011	11:48:53 AM	SiCl4 post valve closed
2/1/2011	11:48:53 AM	Bubbler valve closed
2/1/2011	11:48:53 AM	Helium valve opened
2/1/2011	11:48:53 AM	Main Vac valve opened
2/1/2011	11:48:53 AM	Bypass valve opened
2/1/2011	11:48:53 AM	Helium MFC set to  100.000000
2/1/2011	11:48:53 AM	H2 MFC set to  0.000000
2/1/2011	11:48:53 AM	BCl3 MFC set to  0.000000
2/1/2011	11:48:53 AM	PHl3 MFC set to  0.000000
2/1/2011	11:48:53 AM	SiCl4 MFC set to  0.000000
2/1/2011	11:48:53 AM	Bypass solenoid MFC set to  0.000000
2/1/2011	11:48:53 AM	Tube furnace set to 0
2/1/2011	11:49:53 AM	Helium valve closed
2/1/2011	11:49:53 AM	H2 valve closed
2/1/2011	11:49:53 AM	BCl3 valve closed
2/1/2011	11:49:53 AM	PH3 valve closed
2/1/2011	11:49:53 AM	SiCl4 pre valve closed
2/1/2011	11:49:53 AM	SiCl4 post valve closed
2/1/2011	11:49:53 AM	Bubbler valve closed
2/1/2011	11:49:53 AM	Main Vac valve opened
2/1/2011	11:49:53 AM	Bypass valve opened
2/1/2011	11:49:53 AM	Helium MFC set to  0.000000
2/1/2011	11:49:53 AM	H2 MFC set to  0.000000
2/1/2011	11:49:53 AM	BCl3 MFC set to  0.000000
2/1/2011	11:49:53 AM	PHl3 MFC set to  0.000000
2/1/2011	11:49:53 AM	SiCl4 MFC set to  0.000000
2/1/2011	11:49:53 AM	Bypass solenoid MFC set to  0.000000
2/1/2011	11:49:53 AM	Tube furnace set to 0
2/1/2011	11:50:53 AM	H2 valve closed
2/1/2011	11:50:53 AM	BCl3 valve closed
2/1/2011	11:50:53 AM	PH3 valve closed
2/1/2011	11:50:53 AM	SiCl4 pre valve closed
2/1/2011	11:50:53 AM	SiCl4 post valve closed
2/1/2011	11:50:53 AM	Bubbler valve closed
2/1/2011	11:50:53 AM	Helium valve opened
2/1/2011	11:50:53 AM	Main Vac valve opened
2/1/2011	11:50:53 AM	Bypass valve opened
2/1/2011	11:50:53 AM	Helium MFC set to  100.000000
2/1/2011	11:50:53 AM	H2 MFC set to  0.000000
2/1/2011	11:50:53 AM	BCl3 MFC set to  0.000000
2/1/2011	11:50:53 AM	PHl3 MFC set to  0.000000
2/1/2011	11:50:53 AM	SiCl4 MFC set to  0.000000
2/1/2011	11:50:53 AM	Bypass solenoid MFC set to  0.000000
2/1/2011	11:50:53 AM	Tube furnace set to 0
2/1/2011	11:51:54 AM	Helium valve closed
2/1/2011	11:51:54 AM	H2 valve closed
2/1/2011	11:51:54 AM	BCl3 valve closed
2/1/2011	11:51:54 AM	PH3 valve closed
2/1/2011	11:51:54 AM	SiCl4 pre valve closed
2/1/2011	11:51:54 AM	SiCl4 post valve closed
2/1/2011	11:51:54 AM	Bubbler valve closed
2/1/2011	11:51:54 AM	Main Vac valve opened
2/1/2011	11:51:54 AM	Bypass valve opened
2/1/2011	11:51:54 AM	Helium MFC set to  0.000000
2/1/2011	11:51:54 AM	H2 MFC set to  0.000000
2/1/2011	11:51:54 AM	BCl3 MFC set to  0.000000
2/1/2011	11:51:54 AM	PHl3 MFC set to  0.000000
2/1/2011	11:51:54 AM	SiCl4 MFC set to  0.000000
2/1/2011	11:51:54 AM	Bypass solenoid MFC set to  0.000000
2/1/2011	11:51:54 AM	Tube furnace set to 0
2/1/2011	11:52:54 AM	H2 valve closed
2/1/2011	11:52:54 AM	BCl3 valve closed
2/1/2011	11:52:54 AM	PH3 valve closed
2/1/2011	11:52:54 AM	SiCl4 pre valve closed
2/1/2011	11:52:54 AM	SiCl4 post valve closed
2/1/2011	11:52:54 AM	Bubbler valve closed
2/1/2011	11:52:54 AM	Helium valve opened
2/1/2011	11:52:54 AM	Main Vac valve opened
2/1/2011	11:52:54 AM	Bypass valve opened
2/1/2011	11:52:54 AM	Helium MFC set to  100.000000
2/1/2011	11:52:54 AM	H2 MFC set to  0.000000
2/1/2011	11:52:54 AM	BCl3 MFC set to  0.000000
2/1/2011	11:52:54 AM	PHl3 MFC set to  0.000000
2/1/2011	11:52:54 AM	SiCl4 MFC set to  0.000000
2/1/2011	11:52:54 AM	Bypass solenoid MFC set to  0.000000
2/1/2011	11:52:54 AM	Tube furnace set to 0
2/1/2011	11:53:54 AM	Helium valve closed
2/1/2011	11:53:54 AM	H2 valve closed
2/1/2011	11:53:54 AM	BCl3 valve closed
2/1/2011	11:53:54 AM	PH3 valve closed
2/1/2011	11:53:54 AM	SiCl4 pre valve closed
2/1/2011	11:53:54 AM	SiCl4 post valve closed
2/1/2011	11:53:54 AM	Bubbler valve closed
2/1/2011	11:53:54 AM	Main Vac valve opened
2/1/2011	11:53:54 AM	Bypass valve opened
2/1/2011	11:53:54 AM	Helium MFC set to  0.000000
2/1/2011	11:53:54 AM	H2 MFC set to  0.000000
2/1/2011	11:53:54 AM	BCl3 MFC set to  0.000000
2/1/2011	11:53:54 AM	PHl3 MFC set to  0.000000
2/1/2011	11:53:54 AM	SiCl4 MFC set to  0.000000
2/1/2011	11:53:54 AM	Bypass solenoid MFC set to  0.000000
2/1/2011	11:53:54 AM	Tube furnace set to 0
2/1/2011	11:54:54 AM	H2 valve closed
2/1/2011	11:54:54 AM	BCl3 valve closed
2/1/2011	11:54:54 AM	PH3 valve closed
2/1/2011	11:54:54 AM	SiCl4 pre valve closed
2/1/2011	11:54:54 AM	SiCl4 post valve closed
2/1/2011	11:54:54 AM	Bubbler valve closed
2/1/2011	11:54:54 AM	Helium valve opened
2/1/2011	11:54:54 AM	Main Vac valve opened
2/1/2011	11:54:54 AM	Bypass valve opened
2/1/2011	11:54:54 AM	Helium MFC set to  100.000000
2/1/2011	11:54:54 AM	H2 MFC set to  0.000000
2/1/2011	11:54:54 AM	BCl3 MFC set to  0.000000
2/1/2011	11:54:54 AM	PHl3 MFC set to  0.000000
2/1/2011	11:54:54 AM	SiCl4 MFC set to  0.000000
2/1/2011	11:54:54 AM	Bypass solenoid MFC set to  0.000000
2/1/2011	11:54:54 AM	Tube furnace set to 0
2/1/2011	11:55:54 AM	Helium valve closed
2/1/2011	11:55:54 AM	H2 valve closed
2/1/2011	11:55:54 AM	BCl3 valve closed
2/1/2011	11:55:54 AM	PH3 valve closed
2/1/2011	11:55:54 AM	SiCl4 pre valve closed
2/1/2011	11:55:54 AM	SiCl4 post valve closed
2/1/2011	11:55:54 AM	Bubbler valve closed
2/1/2011	11:55:54 AM	Main Vac valve opened
2/1/2011	11:55:54 AM	Bypass valve opened
2/1/2011	11:55:54 AM	Helium MFC set to  0.000000
2/1/2011	11:55:54 AM	H2 MFC set to  0.000000
2/1/2011	11:55:54 AM	BCl3 MFC set to  0.000000
2/1/2011	11:55:54 AM	PHl3 MFC set to  0.000000
2/1/2011	11:55:54 AM	SiCl4 MFC set to  0.000000
2/1/2011	11:55:54 AM	Bypass solenoid MFC set to  0.000000
2/1/2011	11:55:54 AM	Tube furnace set to 0
2/1/2011	11:56:55 AM	H2 valve closed
2/1/2011	11:56:55 AM	BCl3 valve closed
2/1/2011	11:56:55 AM	PH3 valve closed
2/1/2011	11:56:55 AM	SiCl4 pre valve closed
2/1/2011	11:56:55 AM	SiCl4 post valve closed
2/1/2011	11:56:55 AM	Bubbler valve closed
2/1/2011	11:56:55 AM	Helium valve opened
2/1/2011	11:56:55 AM	Main Vac valve opened
2/1/2011	11:56:55 AM	Bypass valve opened
2/1/2011	11:56:55 AM	Helium MFC set to  100.000000
2/1/2011	11:56:55 AM	H2 MFC set to  0.000000
2/1/2011	11:56:55 AM	BCl3 MFC set to  0.000000
2/1/2011	11:56:55 AM	PHl3 MFC set to  0.000000
2/1/2011	11:56:55 AM	SiCl4 MFC set to  0.000000
2/1/2011	11:56:55 AM	Bypass solenoid MFC set to  0.000000
2/1/2011	11:56:55 AM	Tube furnace set to 0
2/1/2011	11:57:55 AM	Helium valve closed
2/1/2011	11:57:55 AM	H2 valve closed
2/1/2011	11:57:55 AM	BCl3 valve closed
2/1/2011	11:57:55 AM	PH3 valve closed
2/1/2011	11:57:55 AM	SiCl4 pre valve closed
2/1/2011	11:57:55 AM	SiCl4 post valve closed
2/1/2011	11:57:55 AM	Bubbler valve closed
2/1/2011	11:57:55 AM	Main Vac valve opened
2/1/2011	11:57:55 AM	Bypass valve opened
2/1/2011	11:57:55 AM	Helium MFC set to  0.000000
2/1/2011	11:57:55 AM	H2 MFC set to  0.000000
2/1/2011	11:57:55 AM	BCl3 MFC set to  0.000000
2/1/2011	11:57:55 AM	PHl3 MFC set to  0.000000
2/1/2011	11:57:55 AM	SiCl4 MFC set to  0.000000
2/1/2011	11:57:55 AM	Bypass solenoid MFC set to  0.000000
2/1/2011	11:57:55 AM	Tube furnace set to 0
2/1/2011	11:58:55 AM	H2 valve closed
2/1/2011	11:58:55 AM	BCl3 valve closed
2/1/2011	11:58:55 AM	PH3 valve closed
2/1/2011	11:58:55 AM	SiCl4 pre valve closed
2/1/2011	11:58:55 AM	SiCl4 post valve closed
2/1/2011	11:58:55 AM	Bubbler valve closed
2/1/2011	11:58:55 AM	Helium valve opened
2/1/2011	11:58:55 AM	Main Vac valve opened
2/1/2011	11:58:55 AM	Bypass valve opened
2/1/2011	11:58:55 AM	Helium MFC set to  100.000000
2/1/2011	11:58:55 AM	H2 MFC set to  0.000000
2/1/2011	11:58:55 AM	BCl3 MFC set to  0.000000
2/1/2011	11:58:55 AM	PHl3 MFC set to  0.000000
2/1/2011	11:58:55 AM	SiCl4 MFC set to  0.000000
2/1/2011	11:58:55 AM	Bypass solenoid MFC set to  0.000000
2/1/2011	11:58:55 AM	Tube furnace set to 0
2/1/2011	11:59:55 AM	Helium valve closed
2/1/2011	11:59:55 AM	H2 valve closed
2/1/2011	11:59:55 AM	BCl3 valve closed
2/1/2011	11:59:55 AM	PH3 valve closed
2/1/2011	11:59:55 AM	SiCl4 pre valve closed
2/1/2011	11:59:55 AM	SiCl4 post valve closed
2/1/2011	11:59:55 AM	Bubbler valve closed
2/1/2011	11:59:55 AM	Main Vac valve opened
2/1/2011	11:59:55 AM	Bypass valve opened
2/1/2011	11:59:55 AM	Helium MFC set to  0.000000
2/1/2011	11:59:55 AM	H2 MFC set to  0.000000
2/1/2011	11:59:55 AM	BCl3 MFC set to  0.000000
2/1/2011	11:59:55 AM	PHl3 MFC set to  0.000000
2/1/2011	11:59:55 AM	SiCl4 MFC set to  0.000000
2/1/2011	11:59:55 AM	Bypass solenoid MFC set to  0.000000
2/1/2011	11:59:55 AM	Tube furnace set to 0
2/1/2011	12:00:55 PM	H2 valve closed
2/1/2011	12:00:55 PM	BCl3 valve closed
2/1/2011	12:00:55 PM	PH3 valve closed
2/1/2011	12:00:55 PM	SiCl4 pre valve closed
2/1/2011	12:00:55 PM	SiCl4 post valve closed
2/1/2011	12:00:55 PM	Bubbler valve closed
2/1/2011	12:00:55 PM	Helium valve opened
2/1/2011	12:00:55 PM	Main Vac valve opened
2/1/2011	12:00:55 PM	Bypass valve opened
2/1/2011	12:00:55 PM	Helium MFC set to  100.000000
2/1/2011	12:00:55 PM	H2 MFC set to  0.000000
2/1/2011	12:00:55 PM	BCl3 MFC set to  0.000000
2/1/2011	12:00:55 PM	PHl3 MFC set to  0.000000
2/1/2011	12:00:55 PM	SiCl4 MFC set to  0.000000
2/1/2011	12:00:55 PM	Bypass solenoid MFC set to  0.000000
2/1/2011	12:00:55 PM	Tube furnace set to 0
2/1/2011	12:01:56 PM	Helium valve closed
2/1/2011	12:01:56 PM	H2 valve closed
2/1/2011	12:01:56 PM	BCl3 valve closed
2/1/2011	12:01:56 PM	PH3 valve closed
2/1/2011	12:01:56 PM	SiCl4 pre valve closed
2/1/2011	12:01:56 PM	SiCl4 post valve closed
2/1/2011	12:01:56 PM	Bubbler valve closed
2/1/2011	12:01:56 PM	Main Vac valve opened
2/1/2011	12:01:56 PM	Bypass valve opened
2/1/2011	12:01:56 PM	Helium MFC set to  0.000000
2/1/2011	12:01:56 PM	H2 MFC set to  0.000000
2/1/2011	12:01:56 PM	BCl3 MFC set to  0.000000
2/1/2011	12:01:56 PM	PHl3 MFC set to  0.000000
2/1/2011	12:01:56 PM	SiCl4 MFC set to  0.000000
2/1/2011	12:01:56 PM	Bypass solenoid MFC set to  0.000000
2/1/2011	12:01:56 PM	Tube furnace set to 0
2/1/2011	12:02:56 PM	H2 valve closed
2/1/2011	12:02:56 PM	BCl3 valve closed
2/1/2011	12:02:56 PM	PH3 valve closed
2/1/2011	12:02:56 PM	SiCl4 pre valve closed
2/1/2011	12:02:56 PM	SiCl4 post valve closed
2/1/2011	12:02:56 PM	Bubbler valve closed
2/1/2011	12:02:56 PM	Helium valve opened
2/1/2011	12:02:56 PM	Main Vac valve opened
2/1/2011	12:02:56 PM	Bypass valve opened
2/1/2011	12:02:56 PM	Helium MFC set to  100.000000
2/1/2011	12:02:56 PM	H2 MFC set to  0.000000
2/1/2011	12:02:56 PM	BCl3 MFC set to  0.000000
2/1/2011	12:02:56 PM	PHl3 MFC set to  0.000000
2/1/2011	12:02:56 PM	SiCl4 MFC set to  0.000000
2/1/2011	12:02:56 PM	Bypass solenoid MFC set to  0.000000
2/1/2011	12:02:56 PM	Tube furnace set to 0
2/1/2011	12:03:56 PM	Helium valve closed
2/1/2011	12:03:56 PM	H2 valve closed
2/1/2011	12:03:56 PM	BCl3 valve closed
2/1/2011	12:03:56 PM	PH3 valve closed
2/1/2011	12:03:56 PM	SiCl4 pre valve closed
2/1/2011	12:03:56 PM	SiCl4 post valve closed
2/1/2011	12:03:56 PM	Bubbler valve closed
2/1/2011	12:03:56 PM	Main Vac valve opened
2/1/2011	12:03:56 PM	Bypass valve opened
2/1/2011	12:03:56 PM	Helium MFC set to  0.000000
2/1/2011	12:03:56 PM	H2 MFC set to  0.000000
2/1/2011	12:03:56 PM	BCl3 MFC set to  0.000000
2/1/2011	12:03:56 PM	PHl3 MFC set to  0.000000
2/1/2011	12:03:56 PM	SiCl4 MFC set to  0.000000
2/1/2011	12:03:56 PM	Bypass solenoid MFC set to  0.000000
2/1/2011	12:03:56 PM	Tube furnace set to 0
2/1/2011	12:04:56 PM	H2 valve closed
2/1/2011	12:04:56 PM	BCl3 valve closed
2/1/2011	12:04:56 PM	PH3 valve closed
2/1/2011	12:04:56 PM	SiCl4 pre valve closed
2/1/2011	12:04:56 PM	SiCl4 post valve closed
2/1/2011	12:04:56 PM	Bubbler valve closed
2/1/2011	12:04:56 PM	Helium valve opened
2/1/2011	12:04:56 PM	Main Vac valve opened
2/1/2011	12:04:56 PM	Bypass valve opened
2/1/2011	12:04:56 PM	Helium MFC set to  100.000000
2/1/2011	12:04:56 PM	H2 MFC set to  0.000000
2/1/2011	12:04:56 PM	BCl3 MFC set to  0.000000
2/1/2011	12:04:56 PM	PHl3 MFC set to  0.000000
2/1/2011	12:04:56 PM	SiCl4 MFC set to  0.000000
2/1/2011	12:04:56 PM	Bypass solenoid MFC set to  0.000000
2/1/2011	12:04:56 PM	Tube furnace set to 0
2/1/2011	12:05:56 PM	Helium valve closed
2/1/2011	12:05:56 PM	H2 valve closed
2/1/2011	12:05:56 PM	BCl3 valve closed
2/1/2011	12:05:56 PM	PH3 valve closed
2/1/2011	12:05:56 PM	SiCl4 pre valve closed
2/1/2011	12:05:56 PM	SiCl4 post valve closed
2/1/2011	12:05:56 PM	Bubbler valve closed
2/1/2011	12:05:56 PM	Main Vac valve opened
2/1/2011	12:05:56 PM	Bypass valve opened
2/1/2011	12:05:56 PM	Helium MFC set to  0.000000
2/1/2011	12:05:56 PM	H2 MFC set to  0.000000
2/1/2011	12:05:56 PM	BCl3 MFC set to  0.000000
2/1/2011	12:05:56 PM	PHl3 MFC set to  0.000000
2/1/2011	12:05:56 PM	SiCl4 MFC set to  0.000000
2/1/2011	12:05:56 PM	Bypass solenoid MFC set to  0.000000
2/1/2011	12:05:56 PM	Tube furnace set to 0
2/1/2011	12:06:56 PM	H2 valve closed
2/1/2011	12:06:57 PM	BCl3 valve closed
2/1/2011	12:06:57 PM	PH3 valve closed
2/1/2011	12:06:57 PM	SiCl4 pre valve closed
2/1/2011	12:06:57 PM	SiCl4 post valve closed
2/1/2011	12:06:57 PM	Bubbler valve closed
2/1/2011	12:06:57 PM	Helium valve opened
2/1/2011	12:06:57 PM	Main Vac valve opened
2/1/2011	12:06:57 PM	Bypass valve opened
2/1/2011	12:06:57 PM	Helium MFC set to  100.000000
2/1/2011	12:06:57 PM	H2 MFC set to  0.000000
2/1/2011	12:06:57 PM	BCl3 MFC set to  0.000000
2/1/2011	12:06:57 PM	PHl3 MFC set to  0.000000
2/1/2011	12:06:57 PM	SiCl4 MFC set to  0.000000
2/1/2011	12:06:57 PM	Bypass solenoid MFC set to  0.000000
2/1/2011	12:06:57 PM	Tube furnace set to 0
2/1/2011	12:07:57 PM	Helium valve closed
2/1/2011	12:07:57 PM	H2 valve closed
2/1/2011	12:07:57 PM	BCl3 valve closed
2/1/2011	12:07:57 PM	PH3 valve closed
2/1/2011	12:07:57 PM	SiCl4 pre valve closed
2/1/2011	12:07:57 PM	SiCl4 post valve closed
2/1/2011	12:07:57 PM	Bubbler valve closed
2/1/2011	12:07:57 PM	Main Vac valve opened
2/1/2011	12:07:57 PM	Bypass valve opened
2/1/2011	12:07:57 PM	Helium MFC set to  0.000000
2/1/2011	12:07:57 PM	H2 MFC set to  0.000000
2/1/2011	12:07:57 PM	BCl3 MFC set to  0.000000
2/1/2011	12:07:57 PM	PHl3 MFC set to  0.000000
2/1/2011	12:07:57 PM	SiCl4 MFC set to  0.000000
2/1/2011	12:07:57 PM	Bypass solenoid MFC set to  0.000000
2/1/2011	12:07:57 PM	Tube furnace set to 0
2/1/2011	12:07:58 PM	Run finished at 12:07 PM
2/1/2011	12:07:58 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
2/1/2011	12:25:22 PM	Recipe started at 12:25 PM
2/1/2011	12:25:22 PM	Helium valve closed
2/1/2011	12:25:22 PM	BCl3 valve closed
2/1/2011	12:25:22 PM	PH3 valve closed
2/1/2011	12:25:22 PM	SiCl4 pre valve closed
2/1/2011	12:25:22 PM	SiCl4 post valve closed
2/1/2011	12:25:22 PM	Main Vac valve closed
2/1/2011	12:25:22 PM	Bypass valve closed
2/1/2011	12:25:22 PM	Bubbler valve closed
2/1/2011	12:25:22 PM	H2 valve opened
2/1/2011	12:25:22 PM	Helium MFC set to  0.000000
2/1/2011	12:25:22 PM	H2 MFC set to  500.000000
2/1/2011	12:25:22 PM	BCl3 MFC set to  0.000000
2/1/2011	12:25:22 PM	PHl3 MFC set to  0.000000
2/1/2011	12:25:22 PM	SiCl4 MFC set to  0.000000
2/1/2011	12:25:22 PM	Bypass solenoid MFC set to  0.000000
2/1/2011	12:25:22 PM	Tube furnace set to 200
2/1/2011	12:26:39 PM	Helium valve closed
2/1/2011	12:26:39 PM	BCl3 valve closed
2/1/2011	12:26:39 PM	PH3 valve closed
2/1/2011	12:26:39 PM	SiCl4 pre valve closed
2/1/2011	12:26:39 PM	SiCl4 post valve closed
2/1/2011	12:26:39 PM	Main Vac valve closed
2/1/2011	12:26:39 PM	Bypass valve closed
2/1/2011	12:26:39 PM	H2 valve opened
2/1/2011	12:26:39 PM	Bubbler valve opened
2/1/2011	12:26:39 PM	Helium MFC set to  0.000000
2/1/2011	12:26:39 PM	H2 MFC set to  400.000000
2/1/2011	12:26:39 PM	BCl3 MFC set to  0.000000
2/1/2011	12:26:39 PM	PHl3 MFC set to  0.000000
2/1/2011	12:26:39 PM	SiCl4 MFC set to  0.000000
2/1/2011	12:26:39 PM	Bypass solenoid MFC set to  0.000000
2/1/2011	12:26:39 PM	Tube furnace set to 1002
2/1/2011	12:42:39 PM	Helium valve closed
2/1/2011	12:42:39 PM	BCl3 valve closed
2/1/2011	12:42:39 PM	PH3 valve closed
2/1/2011	12:42:39 PM	SiCl4 pre valve closed
2/1/2011	12:42:39 PM	SiCl4 post valve closed
2/1/2011	12:42:39 PM	Main Vac valve closed
2/1/2011	12:42:39 PM	Bypass valve closed
2/1/2011	12:42:39 PM	H2 valve opened
2/1/2011	12:42:39 PM	Bubbler valve opened
2/1/2011	12:42:39 PM	Helium MFC set to  0.000000
2/1/2011	12:42:39 PM	H2 MFC set to  400.000000
2/1/2011	12:42:39 PM	BCl3 MFC set to  0.000000
2/1/2011	12:42:39 PM	PHl3 MFC set to  0.000000
2/1/2011	12:42:39 PM	SiCl4 MFC set to  0.000000
2/1/2011	12:42:39 PM	Bypass solenoid MFC set to  0.000000
2/1/2011	12:42:39 PM	Tube furnace set to 1000
2/1/2011	12:47:39 PM	Helium valve closed
2/1/2011	12:47:39 PM	PH3 valve closed
2/1/2011	12:47:39 PM	Main Vac valve closed
2/1/2011	12:47:39 PM	Bypass valve closed
2/1/2011	12:47:39 PM	H2 valve opened
2/1/2011	12:47:39 PM	BCl3 valve opened
2/1/2011	12:47:39 PM	SiCl4 pre valve opened
2/1/2011	12:47:39 PM	SiCl4 post valve opened
2/1/2011	12:47:39 PM	Bubbler valve opened
2/1/2011	12:47:39 PM	Helium MFC set to  0.000000
2/1/2011	12:47:39 PM	H2 MFC set to  400.000000
2/1/2011	12:47:39 PM	BCl3 MFC set to  3.000000
2/1/2011	12:47:39 PM	PHl3 MFC set to  0.000000
2/1/2011	12:47:39 PM	SiCl4 MFC set to  40.000000
2/1/2011	12:47:39 PM	Bypass solenoid MFC set to  0.000000
2/1/2011	12:47:39 PM	Tube furnace set to 1000
2/1/2011	1:07:39 PM	Helium valve closed
2/1/2011	1:07:39 PM	BCl3 valve closed
2/1/2011	1:07:39 PM	PH3 valve closed
2/1/2011	1:07:39 PM	SiCl4 pre valve closed
2/1/2011	1:07:39 PM	SiCl4 post valve closed
2/1/2011	1:07:39 PM	Main Vac valve closed
2/1/2011	1:07:39 PM	Bypass valve closed
2/1/2011	1:07:39 PM	H2 valve opened
2/1/2011	1:07:39 PM	Bubbler valve opened
2/1/2011	1:07:39 PM	Helium MFC set to  0.000000
2/1/2011	1:07:39 PM	H2 MFC set to  500.000000
2/1/2011	1:07:39 PM	BCl3 MFC set to  0.000000
2/1/2011	1:07:39 PM	PHl3 MFC set to  0.000000
2/1/2011	1:07:39 PM	SiCl4 MFC set to  0.000000
2/1/2011	1:07:39 PM	Bypass solenoid MFC set to  0.000000
2/1/2011	1:07:40 PM	Tube furnace set to 0
2/1/2011	1:08:00 PM	H2 valve closed
2/1/2011	1:08:00 PM	BCl3 valve closed
2/1/2011	1:08:00 PM	PH3 valve closed
2/1/2011	1:08:00 PM	SiCl4 pre valve closed
2/1/2011	1:08:00 PM	SiCl4 post valve closed
2/1/2011	1:08:00 PM	Main Vac valve closed
2/1/2011	1:08:00 PM	Bypass valve closed
2/1/2011	1:08:00 PM	Helium valve opened
2/1/2011	1:08:00 PM	Bubbler valve opened
2/1/2011	1:08:00 PM	Helium MFC set to  400.000000
2/1/2011	1:08:00 PM	H2 MFC set to  0.000000
2/1/2011	1:08:00 PM	BCl3 MFC set to  0.000000
2/1/2011	1:08:00 PM	PHl3 MFC set to  0.000000
2/1/2011	1:08:00 PM	SiCl4 MFC set to  0.000000
2/1/2011	1:08:00 PM	Bypass solenoid MFC set to  0.000000
2/1/2011	1:08:00 PM	Tube furnace set to 0
2/1/2011	1:28:00 PM	Helium valve closed
2/1/2011	1:28:00 PM	H2 valve closed
2/1/2011	1:28:00 PM	BCl3 valve closed
2/1/2011	1:28:00 PM	PH3 valve closed
2/1/2011	1:28:00 PM	SiCl4 pre valve closed
2/1/2011	1:28:00 PM	SiCl4 post valve closed
2/1/2011	1:28:00 PM	Main Vac valve closed
2/1/2011	1:28:00 PM	Bypass valve closed
2/1/2011	1:28:00 PM	Bubbler valve closed
2/1/2011	1:28:00 PM	Helium MFC set to  0.000000
2/1/2011	1:28:00 PM	H2 MFC set to  0.000000
2/1/2011	1:28:00 PM	BCl3 MFC set to  0.000000
2/1/2011	1:28:00 PM	PHl3 MFC set to  0.000000
2/1/2011	1:28:00 PM	SiCl4 MFC set to  0.000000
2/1/2011	1:28:00 PM	Bypass solenoid MFC set to  0.000000
2/1/2011	1:28:00 PM	Tube furnace set to 0
2/1/2011	1:28:00 PM	Run finished at 1:28 PM
2/1/2011	1:58:36 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/1/2011	1:58:37 PM	Recipe started at 1:58 PM
2/1/2011	1:58:37 PM	H2 valve closed
2/1/2011	1:58:37 PM	BCl3 valve closed
2/1/2011	1:58:37 PM	PH3 valve closed
2/1/2011	1:58:37 PM	SiCl4 pre valve closed
2/1/2011	1:58:37 PM	SiCl4 post valve closed
2/1/2011	1:58:37 PM	Main Vac valve closed
2/1/2011	1:58:37 PM	Bypass valve closed
2/1/2011	1:58:37 PM	Bubbler valve closed
2/1/2011	1:58:37 PM	Helium valve opened
2/1/2011	1:58:37 PM	Helium MFC set to  500.000000
2/1/2011	1:58:37 PM	H2 MFC set to  0.000000
2/1/2011	1:58:37 PM	BCl3 MFC set to  0.000000
2/1/2011	1:58:37 PM	PHl3 MFC set to  0.000000
2/1/2011	1:58:37 PM	SiCl4 MFC set to  0.000000
2/1/2011	1:58:37 PM	Bypass solenoid MFC set to  0.000000
2/1/2011	1:58:37 PM	Tube furnace set to 0
2/1/2011	1:58:45 PM	Helium valve closed
2/1/2011	1:58:45 PM	H2 valve closed
2/1/2011	1:58:45 PM	BCl3 valve closed
2/1/2011	1:58:45 PM	PH3 valve closed
2/1/2011	1:58:45 PM	SiCl4 pre valve closed
2/1/2011	1:58:45 PM	SiCl4 post valve closed
2/1/2011	1:58:45 PM	Main Vac valve closed
2/1/2011	1:58:45 PM	Bypass valve closed
2/1/2011	1:58:45 PM	Bubbler valve closed
2/1/2011	1:58:45 PM	Helium MFC set to  0.000000
2/1/2011	1:58:45 PM	H2 MFC set to  0.000000
2/1/2011	1:58:45 PM	BCl3 MFC set to  0.000000
2/1/2011	1:58:45 PM	PHl3 MFC set to  0.000000
2/1/2011	1:58:45 PM	SiCl4 MFC set to  0.000000
2/1/2011	1:58:45 PM	Bypass solenoid MFC set to  0.000000
2/1/2011	1:58:45 PM	Tube furnace set to 0
2/1/2011	1:58:46 PM	Run finished at 1:58 PM
2/1/2011	1:58:46 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/1/2011	2:02:23 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
2/1/2011	2:02:36 PM	Recipe started at 2:02 PM
2/1/2011	2:02:36 PM	Helium valve closed
2/1/2011	2:02:36 PM	H2 valve closed
2/1/2011	2:02:36 PM	BCl3 valve closed
2/1/2011	2:02:36 PM	PH3 valve closed
2/1/2011	2:02:36 PM	SiCl4 pre valve closed
2/1/2011	2:02:36 PM	SiCl4 post valve closed
2/1/2011	2:02:36 PM	Main Vac valve closed
2/1/2011	2:02:36 PM	Bubbler valve closed
2/1/2011	2:02:36 PM	Bypass valve opened
2/1/2011	2:02:36 PM	Helium MFC set to  0.000000
2/1/2011	2:02:36 PM	H2 MFC set to  0.000000
2/1/2011	2:02:36 PM	BCl3 MFC set to  0.000000
2/1/2011	2:02:36 PM	PHl3 MFC set to  0.000000
2/1/2011	2:02:36 PM	SiCl4 MFC set to  0.000000
2/1/2011	2:02:36 PM	Bypass solenoid MFC set to  0.000000
2/1/2011	2:02:36 PM	Tube furnace set to 0
2/1/2011	2:03:08 PM	Helium valve closed
2/1/2011	2:03:08 PM	H2 valve closed
2/1/2011	2:03:08 PM	BCl3 valve closed
2/1/2011	2:03:08 PM	PH3 valve closed
2/1/2011	2:03:08 PM	SiCl4 pre valve closed
2/1/2011	2:03:08 PM	SiCl4 post valve closed
2/1/2011	2:03:08 PM	Bubbler valve closed
2/1/2011	2:03:08 PM	Main Vac valve opened
2/1/2011	2:03:08 PM	Bypass valve opened
2/1/2011	2:03:08 PM	Helium MFC set to  0.000000
2/1/2011	2:03:08 PM	H2 MFC set to  0.000000
2/1/2011	2:03:08 PM	BCl3 MFC set to  0.000000
2/1/2011	2:03:08 PM	PHl3 MFC set to  0.000000
2/1/2011	2:03:08 PM	SiCl4 MFC set to  0.000000
2/1/2011	2:03:08 PM	Bypass solenoid MFC set to  0.000000
2/1/2011	2:03:08 PM	Tube furnace set to 0
2/1/2011	2:04:08 PM	H2 valve closed
2/1/2011	2:04:08 PM	BCl3 valve closed
2/1/2011	2:04:08 PM	PH3 valve closed
2/1/2011	2:04:08 PM	SiCl4 pre valve closed
2/1/2011	2:04:08 PM	SiCl4 post valve closed
2/1/2011	2:04:08 PM	Bubbler valve closed
2/1/2011	2:04:08 PM	Helium valve opened
2/1/2011	2:04:08 PM	Main Vac valve opened
2/1/2011	2:04:08 PM	Bypass valve opened
2/1/2011	2:04:08 PM	Helium MFC set to  100.000000
2/1/2011	2:04:08 PM	H2 MFC set to  0.000000
2/1/2011	2:04:08 PM	BCl3 MFC set to  0.000000
2/1/2011	2:04:08 PM	PHl3 MFC set to  0.000000
2/1/2011	2:04:08 PM	SiCl4 MFC set to  0.000000
2/1/2011	2:04:08 PM	Bypass solenoid MFC set to  0.000000
2/1/2011	2:04:08 PM	Tube furnace set to 0
2/1/2011	2:05:08 PM	Helium valve closed
2/1/2011	2:05:08 PM	H2 valve closed
2/1/2011	2:05:08 PM	BCl3 valve closed
2/1/2011	2:05:08 PM	PH3 valve closed
2/1/2011	2:05:08 PM	SiCl4 pre valve closed
2/1/2011	2:05:08 PM	SiCl4 post valve closed
2/1/2011	2:05:08 PM	Bubbler valve closed
2/1/2011	2:05:08 PM	Main Vac valve opened
2/1/2011	2:05:08 PM	Bypass valve opened
2/1/2011	2:05:08 PM	Helium MFC set to  0.000000
2/1/2011	2:05:08 PM	H2 MFC set to  0.000000
2/1/2011	2:05:08 PM	BCl3 MFC set to  0.000000
2/1/2011	2:05:08 PM	PHl3 MFC set to  0.000000
2/1/2011	2:05:08 PM	SiCl4 MFC set to  0.000000
2/1/2011	2:05:08 PM	Bypass solenoid MFC set to  0.000000
2/1/2011	2:05:09 PM	Tube furnace set to 0
2/1/2011	2:06:09 PM	H2 valve closed
2/1/2011	2:06:09 PM	BCl3 valve closed
2/1/2011	2:06:09 PM	PH3 valve closed
2/1/2011	2:06:09 PM	SiCl4 pre valve closed
2/1/2011	2:06:09 PM	SiCl4 post valve closed
2/1/2011	2:06:09 PM	Bubbler valve closed
2/1/2011	2:06:09 PM	Helium valve opened
2/1/2011	2:06:09 PM	Main Vac valve opened
2/1/2011	2:06:09 PM	Bypass valve opened
2/1/2011	2:06:09 PM	Helium MFC set to  100.000000
2/1/2011	2:06:09 PM	H2 MFC set to  0.000000
2/1/2011	2:06:09 PM	BCl3 MFC set to  0.000000
2/1/2011	2:06:09 PM	PHl3 MFC set to  0.000000
2/1/2011	2:06:09 PM	SiCl4 MFC set to  0.000000
2/1/2011	2:06:09 PM	Bypass solenoid MFC set to  0.000000
2/1/2011	2:06:09 PM	Tube furnace set to 0
2/1/2011	2:07:09 PM	Helium valve closed
2/1/2011	2:07:09 PM	H2 valve closed
2/1/2011	2:07:09 PM	BCl3 valve closed
2/1/2011	2:07:09 PM	PH3 valve closed
2/1/2011	2:07:09 PM	SiCl4 pre valve closed
2/1/2011	2:07:09 PM	SiCl4 post valve closed
2/1/2011	2:07:09 PM	Bubbler valve closed
2/1/2011	2:07:09 PM	Main Vac valve opened
2/1/2011	2:07:09 PM	Bypass valve opened
2/1/2011	2:07:09 PM	Helium MFC set to  0.000000
2/1/2011	2:07:09 PM	H2 MFC set to  0.000000
2/1/2011	2:07:09 PM	BCl3 MFC set to  0.000000
2/1/2011	2:07:09 PM	PHl3 MFC set to  0.000000
2/1/2011	2:07:09 PM	SiCl4 MFC set to  0.000000
2/1/2011	2:07:09 PM	Bypass solenoid MFC set to  0.000000
2/1/2011	2:07:09 PM	Tube furnace set to 0
2/1/2011	2:08:09 PM	H2 valve closed
2/1/2011	2:08:09 PM	BCl3 valve closed
2/1/2011	2:08:09 PM	PH3 valve closed
2/1/2011	2:08:09 PM	SiCl4 pre valve closed
2/1/2011	2:08:09 PM	SiCl4 post valve closed
2/1/2011	2:08:09 PM	Bubbler valve closed
2/1/2011	2:08:09 PM	Helium valve opened
2/1/2011	2:08:09 PM	Main Vac valve opened
2/1/2011	2:08:09 PM	Bypass valve opened
2/1/2011	2:08:09 PM	Helium MFC set to  100.000000
2/1/2011	2:08:09 PM	H2 MFC set to  0.000000
2/1/2011	2:08:09 PM	BCl3 MFC set to  0.000000
2/1/2011	2:08:09 PM	PHl3 MFC set to  0.000000
2/1/2011	2:08:09 PM	SiCl4 MFC set to  0.000000
2/1/2011	2:08:09 PM	Bypass solenoid MFC set to  0.000000
2/1/2011	2:08:09 PM	Tube furnace set to 0
2/1/2011	2:09:09 PM	Helium valve closed
2/1/2011	2:09:09 PM	H2 valve closed
2/1/2011	2:09:09 PM	BCl3 valve closed
2/1/2011	2:09:09 PM	PH3 valve closed
2/1/2011	2:09:09 PM	SiCl4 pre valve closed
2/1/2011	2:09:09 PM	SiCl4 post valve closed
2/1/2011	2:09:09 PM	Bubbler valve closed
2/1/2011	2:09:09 PM	Main Vac valve opened
2/1/2011	2:09:09 PM	Bypass valve opened
2/1/2011	2:09:09 PM	Helium MFC set to  0.000000
2/1/2011	2:09:09 PM	H2 MFC set to  0.000000
2/1/2011	2:09:09 PM	BCl3 MFC set to  0.000000
2/1/2011	2:09:09 PM	PHl3 MFC set to  0.000000
2/1/2011	2:09:09 PM	SiCl4 MFC set to  0.000000
2/1/2011	2:09:09 PM	Bypass solenoid MFC set to  0.000000
2/1/2011	2:09:09 PM	Tube furnace set to 0
2/1/2011	2:10:09 PM	H2 valve closed
2/1/2011	2:10:09 PM	BCl3 valve closed
2/1/2011	2:10:09 PM	PH3 valve closed
2/1/2011	2:10:09 PM	SiCl4 pre valve closed
2/1/2011	2:10:09 PM	SiCl4 post valve closed
2/1/2011	2:10:09 PM	Bubbler valve closed
2/1/2011	2:10:09 PM	Helium valve opened
2/1/2011	2:10:09 PM	Main Vac valve opened
2/1/2011	2:10:09 PM	Bypass valve opened
2/1/2011	2:10:09 PM	Helium MFC set to  100.000000
2/1/2011	2:10:09 PM	H2 MFC set to  0.000000
2/1/2011	2:10:09 PM	BCl3 MFC set to  0.000000
2/1/2011	2:10:09 PM	PHl3 MFC set to  0.000000
2/1/2011	2:10:09 PM	SiCl4 MFC set to  0.000000
2/1/2011	2:10:09 PM	Bypass solenoid MFC set to  0.000000
2/1/2011	2:10:10 PM	Tube furnace set to 0
2/1/2011	2:11:10 PM	Helium valve closed
2/1/2011	2:11:10 PM	H2 valve closed
2/1/2011	2:11:10 PM	BCl3 valve closed
2/1/2011	2:11:10 PM	PH3 valve closed
2/1/2011	2:11:10 PM	SiCl4 pre valve closed
2/1/2011	2:11:10 PM	SiCl4 post valve closed
2/1/2011	2:11:10 PM	Bubbler valve closed
2/1/2011	2:11:10 PM	Main Vac valve opened
2/1/2011	2:11:10 PM	Bypass valve opened
2/1/2011	2:11:10 PM	Helium MFC set to  0.000000
2/1/2011	2:11:10 PM	H2 MFC set to  0.000000
2/1/2011	2:11:10 PM	BCl3 MFC set to  0.000000
2/1/2011	2:11:10 PM	PHl3 MFC set to  0.000000
2/1/2011	2:11:10 PM	SiCl4 MFC set to  0.000000
2/1/2011	2:11:10 PM	Bypass solenoid MFC set to  0.000000
2/1/2011	2:11:10 PM	Tube furnace set to 0
2/1/2011	2:12:10 PM	H2 valve closed
2/1/2011	2:12:10 PM	BCl3 valve closed
2/1/2011	2:12:10 PM	PH3 valve closed
2/1/2011	2:12:10 PM	SiCl4 pre valve closed
2/1/2011	2:12:10 PM	SiCl4 post valve closed
2/1/2011	2:12:10 PM	Bubbler valve closed
2/1/2011	2:12:10 PM	Helium valve opened
2/1/2011	2:12:10 PM	Main Vac valve opened
2/1/2011	2:12:10 PM	Bypass valve opened
2/1/2011	2:12:10 PM	Helium MFC set to  100.000000
2/1/2011	2:12:10 PM	H2 MFC set to  0.000000
2/1/2011	2:12:10 PM	BCl3 MFC set to  0.000000
2/1/2011	2:12:10 PM	PHl3 MFC set to  0.000000
2/1/2011	2:12:10 PM	SiCl4 MFC set to  0.000000
2/1/2011	2:12:10 PM	Bypass solenoid MFC set to  0.000000
2/1/2011	2:12:10 PM	Tube furnace set to 0
2/1/2011	2:13:10 PM	Helium valve closed
2/1/2011	2:13:10 PM	H2 valve closed
2/1/2011	2:13:10 PM	BCl3 valve closed
2/1/2011	2:13:10 PM	PH3 valve closed
2/1/2011	2:13:10 PM	SiCl4 pre valve closed
2/1/2011	2:13:10 PM	SiCl4 post valve closed
2/1/2011	2:13:10 PM	Bubbler valve closed
2/1/2011	2:13:10 PM	Main Vac valve opened
2/1/2011	2:13:10 PM	Bypass valve opened
2/1/2011	2:13:10 PM	Helium MFC set to  0.000000
2/1/2011	2:13:10 PM	H2 MFC set to  0.000000
2/1/2011	2:13:10 PM	BCl3 MFC set to  0.000000
2/1/2011	2:13:10 PM	PHl3 MFC set to  0.000000
2/1/2011	2:13:10 PM	SiCl4 MFC set to  0.000000
2/1/2011	2:13:10 PM	Bypass solenoid MFC set to  0.000000
2/1/2011	2:13:10 PM	Tube furnace set to 0
2/1/2011	2:14:10 PM	H2 valve closed
2/1/2011	2:14:10 PM	BCl3 valve closed
2/1/2011	2:14:10 PM	PH3 valve closed
2/1/2011	2:14:10 PM	SiCl4 pre valve closed
2/1/2011	2:14:10 PM	SiCl4 post valve closed
2/1/2011	2:14:10 PM	Bubbler valve closed
2/1/2011	2:14:10 PM	Helium valve opened
2/1/2011	2:14:10 PM	Main Vac valve opened
2/1/2011	2:14:10 PM	Bypass valve opened
2/1/2011	2:14:10 PM	Helium MFC set to  100.000000
2/1/2011	2:14:10 PM	H2 MFC set to  0.000000
2/1/2011	2:14:10 PM	BCl3 MFC set to  0.000000
2/1/2011	2:14:10 PM	PHl3 MFC set to  0.000000
2/1/2011	2:14:10 PM	SiCl4 MFC set to  0.000000
2/1/2011	2:14:10 PM	Bypass solenoid MFC set to  0.000000
2/1/2011	2:14:10 PM	Tube furnace set to 0
2/1/2011	2:15:10 PM	Helium valve closed
2/1/2011	2:15:10 PM	H2 valve closed
2/1/2011	2:15:10 PM	BCl3 valve closed
2/1/2011	2:15:10 PM	PH3 valve closed
2/1/2011	2:15:10 PM	SiCl4 pre valve closed
2/1/2011	2:15:10 PM	SiCl4 post valve closed
2/1/2011	2:15:10 PM	Bubbler valve closed
2/1/2011	2:15:10 PM	Main Vac valve opened
2/1/2011	2:15:10 PM	Bypass valve opened
2/1/2011	2:15:10 PM	Helium MFC set to  0.000000
2/1/2011	2:15:10 PM	H2 MFC set to  0.000000
2/1/2011	2:15:10 PM	BCl3 MFC set to  0.000000
2/1/2011	2:15:10 PM	PHl3 MFC set to  0.000000
2/1/2011	2:15:10 PM	SiCl4 MFC set to  0.000000
2/1/2011	2:15:10 PM	Bypass solenoid MFC set to  0.000000
2/1/2011	2:15:10 PM	Tube furnace set to 0
2/1/2011	2:16:11 PM	H2 valve closed
2/1/2011	2:16:11 PM	BCl3 valve closed
2/1/2011	2:16:11 PM	PH3 valve closed
2/1/2011	2:16:11 PM	SiCl4 pre valve closed
2/1/2011	2:16:11 PM	SiCl4 post valve closed
2/1/2011	2:16:11 PM	Bubbler valve closed
2/1/2011	2:16:11 PM	Helium valve opened
2/1/2011	2:16:11 PM	Main Vac valve opened
2/1/2011	2:16:11 PM	Bypass valve opened
2/1/2011	2:16:11 PM	Helium MFC set to  100.000000
2/1/2011	2:16:11 PM	H2 MFC set to  0.000000
2/1/2011	2:16:11 PM	BCl3 MFC set to  0.000000
2/1/2011	2:16:11 PM	PHl3 MFC set to  0.000000
2/1/2011	2:16:11 PM	SiCl4 MFC set to  0.000000
2/1/2011	2:16:11 PM	Bypass solenoid MFC set to  0.000000
2/1/2011	2:16:11 PM	Tube furnace set to 0
2/1/2011	2:17:11 PM	Helium valve closed
2/1/2011	2:17:11 PM	H2 valve closed
2/1/2011	2:17:11 PM	BCl3 valve closed
2/1/2011	2:17:11 PM	PH3 valve closed
2/1/2011	2:17:11 PM	SiCl4 pre valve closed
2/1/2011	2:17:11 PM	SiCl4 post valve closed
2/1/2011	2:17:11 PM	Bubbler valve closed
2/1/2011	2:17:11 PM	Main Vac valve opened
2/1/2011	2:17:11 PM	Bypass valve opened
2/1/2011	2:17:11 PM	Helium MFC set to  0.000000
2/1/2011	2:17:11 PM	H2 MFC set to  0.000000
2/1/2011	2:17:11 PM	BCl3 MFC set to  0.000000
2/1/2011	2:17:11 PM	PHl3 MFC set to  0.000000
2/1/2011	2:17:11 PM	SiCl4 MFC set to  0.000000
2/1/2011	2:17:11 PM	Bypass solenoid MFC set to  0.000000
2/1/2011	2:17:11 PM	Tube furnace set to 0
2/1/2011	2:18:11 PM	H2 valve closed
2/1/2011	2:18:11 PM	BCl3 valve closed
2/1/2011	2:18:11 PM	PH3 valve closed
2/1/2011	2:18:11 PM	SiCl4 pre valve closed
2/1/2011	2:18:11 PM	SiCl4 post valve closed
2/1/2011	2:18:11 PM	Bubbler valve closed
2/1/2011	2:18:11 PM	Helium valve opened
2/1/2011	2:18:11 PM	Main Vac valve opened
2/1/2011	2:18:11 PM	Bypass valve opened
2/1/2011	2:18:11 PM	Helium MFC set to  100.000000
2/1/2011	2:18:11 PM	H2 MFC set to  0.000000
2/1/2011	2:18:11 PM	BCl3 MFC set to  0.000000
2/1/2011	2:18:11 PM	PHl3 MFC set to  0.000000
2/1/2011	2:18:11 PM	SiCl4 MFC set to  0.000000
2/1/2011	2:18:11 PM	Bypass solenoid MFC set to  0.000000
2/1/2011	2:18:11 PM	Tube furnace set to 0
2/1/2011	2:19:11 PM	Helium valve closed
2/1/2011	2:19:11 PM	H2 valve closed
2/1/2011	2:19:11 PM	BCl3 valve closed
2/1/2011	2:19:11 PM	PH3 valve closed
2/1/2011	2:19:11 PM	SiCl4 pre valve closed
2/1/2011	2:19:11 PM	SiCl4 post valve closed
2/1/2011	2:19:11 PM	Bubbler valve closed
2/1/2011	2:19:11 PM	Main Vac valve opened
2/1/2011	2:19:11 PM	Bypass valve opened
2/1/2011	2:19:11 PM	Helium MFC set to  0.000000
2/1/2011	2:19:11 PM	H2 MFC set to  0.000000
2/1/2011	2:19:11 PM	BCl3 MFC set to  0.000000
2/1/2011	2:19:11 PM	PHl3 MFC set to  0.000000
2/1/2011	2:19:11 PM	SiCl4 MFC set to  0.000000
2/1/2011	2:19:11 PM	Bypass solenoid MFC set to  0.000000
2/1/2011	2:19:11 PM	Tube furnace set to 0
2/1/2011	2:20:11 PM	H2 valve closed
2/1/2011	2:20:11 PM	BCl3 valve closed
2/1/2011	2:20:11 PM	PH3 valve closed
2/1/2011	2:20:11 PM	SiCl4 pre valve closed
2/1/2011	2:20:11 PM	SiCl4 post valve closed
2/1/2011	2:20:11 PM	Bubbler valve closed
2/1/2011	2:20:11 PM	Helium valve opened
2/1/2011	2:20:11 PM	Main Vac valve opened
2/1/2011	2:20:11 PM	Bypass valve opened
2/1/2011	2:20:11 PM	Helium MFC set to  100.000000
2/1/2011	2:20:11 PM	H2 MFC set to  0.000000
2/1/2011	2:20:11 PM	BCl3 MFC set to  0.000000
2/1/2011	2:20:11 PM	PHl3 MFC set to  0.000000
2/1/2011	2:20:11 PM	SiCl4 MFC set to  0.000000
2/1/2011	2:20:11 PM	Bypass solenoid MFC set to  0.000000
2/1/2011	2:20:11 PM	Tube furnace set to 0
2/1/2011	2:21:12 PM	Helium valve closed
2/1/2011	2:21:12 PM	H2 valve closed
2/1/2011	2:21:12 PM	BCl3 valve closed
2/1/2011	2:21:12 PM	PH3 valve closed
2/1/2011	2:21:12 PM	SiCl4 pre valve closed
2/1/2011	2:21:12 PM	SiCl4 post valve closed
2/1/2011	2:21:12 PM	Bubbler valve closed
2/1/2011	2:21:12 PM	Main Vac valve opened
2/1/2011	2:21:12 PM	Bypass valve opened
2/1/2011	2:21:12 PM	Helium MFC set to  0.000000
2/1/2011	2:21:12 PM	H2 MFC set to  0.000000
2/1/2011	2:21:12 PM	BCl3 MFC set to  0.000000
2/1/2011	2:21:12 PM	PHl3 MFC set to  0.000000
2/1/2011	2:21:12 PM	SiCl4 MFC set to  0.000000
2/1/2011	2:21:12 PM	Bypass solenoid MFC set to  0.000000
2/1/2011	2:21:12 PM	Tube furnace set to 0
2/1/2011	2:22:12 PM	H2 valve closed
2/1/2011	2:22:12 PM	BCl3 valve closed
2/1/2011	2:22:12 PM	PH3 valve closed
2/1/2011	2:22:12 PM	SiCl4 pre valve closed
2/1/2011	2:22:12 PM	SiCl4 post valve closed
2/1/2011	2:22:12 PM	Bubbler valve closed
2/1/2011	2:22:12 PM	Helium valve opened
2/1/2011	2:22:12 PM	Main Vac valve opened
2/1/2011	2:22:12 PM	Bypass valve opened
2/1/2011	2:22:12 PM	Helium MFC set to  100.000000
2/1/2011	2:22:12 PM	H2 MFC set to  0.000000
2/1/2011	2:22:12 PM	BCl3 MFC set to  0.000000
2/1/2011	2:22:12 PM	PHl3 MFC set to  0.000000
2/1/2011	2:22:12 PM	SiCl4 MFC set to  0.000000
2/1/2011	2:22:12 PM	Bypass solenoid MFC set to  0.000000
2/1/2011	2:22:12 PM	Tube furnace set to 0
2/1/2011	2:23:12 PM	Helium valve closed
2/1/2011	2:23:12 PM	H2 valve closed
2/1/2011	2:23:12 PM	BCl3 valve closed
2/1/2011	2:23:12 PM	PH3 valve closed
2/1/2011	2:23:12 PM	SiCl4 pre valve closed
2/1/2011	2:23:12 PM	SiCl4 post valve closed
2/1/2011	2:23:12 PM	Bubbler valve closed
2/1/2011	2:23:12 PM	Main Vac valve opened
2/1/2011	2:23:12 PM	Bypass valve opened
2/1/2011	2:23:12 PM	Helium MFC set to  0.000000
2/1/2011	2:23:12 PM	H2 MFC set to  0.000000
2/1/2011	2:23:12 PM	BCl3 MFC set to  0.000000
2/1/2011	2:23:12 PM	PHl3 MFC set to  0.000000
2/1/2011	2:23:12 PM	SiCl4 MFC set to  0.000000
2/1/2011	2:23:12 PM	Bypass solenoid MFC set to  0.000000
2/1/2011	2:23:12 PM	Tube furnace set to 0
2/1/2011	2:23:13 PM	Run finished at 2:23 PM
2/1/2011	2:23:13 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
2/1/2011	2:26:03 PM	Recipe started at 2:26 PM
2/1/2011	2:26:03 PM	Helium valve closed
2/1/2011	2:26:03 PM	BCl3 valve closed
2/1/2011	2:26:03 PM	PH3 valve closed
2/1/2011	2:26:03 PM	SiCl4 pre valve closed
2/1/2011	2:26:03 PM	SiCl4 post valve closed
2/1/2011	2:26:03 PM	Main Vac valve closed
2/1/2011	2:26:03 PM	Bypass valve closed
2/1/2011	2:26:03 PM	Bubbler valve closed
2/1/2011	2:26:03 PM	H2 valve opened
2/1/2011	2:26:03 PM	Helium MFC set to  0.000000
2/1/2011	2:26:03 PM	H2 MFC set to  500.000000
2/1/2011	2:26:03 PM	BCl3 MFC set to  0.000000
2/1/2011	2:26:03 PM	PHl3 MFC set to  0.000000
2/1/2011	2:26:03 PM	SiCl4 MFC set to  0.000000
2/1/2011	2:26:03 PM	Bypass solenoid MFC set to  0.000000
2/1/2011	2:26:03 PM	Tube furnace set to 200
2/1/2011	2:27:21 PM	Helium valve closed
2/1/2011	2:27:21 PM	BCl3 valve closed
2/1/2011	2:27:21 PM	PH3 valve closed
2/1/2011	2:27:21 PM	SiCl4 pre valve closed
2/1/2011	2:27:21 PM	SiCl4 post valve closed
2/1/2011	2:27:21 PM	Main Vac valve closed
2/1/2011	2:27:21 PM	Bypass valve closed
2/1/2011	2:27:21 PM	H2 valve opened
2/1/2011	2:27:21 PM	Bubbler valve opened
2/1/2011	2:27:21 PM	Helium MFC set to  0.000000
2/1/2011	2:27:21 PM	H2 MFC set to  400.000000
2/1/2011	2:27:21 PM	BCl3 MFC set to  0.000000
2/1/2011	2:27:21 PM	PHl3 MFC set to  0.000000
2/1/2011	2:27:21 PM	SiCl4 MFC set to  0.000000
2/1/2011	2:27:21 PM	Bypass solenoid MFC set to  0.000000
2/1/2011	2:27:21 PM	Tube furnace set to 1002
2/1/2011	2:43:21 PM	Helium valve closed
2/1/2011	2:43:21 PM	BCl3 valve closed
2/1/2011	2:43:21 PM	PH3 valve closed
2/1/2011	2:43:21 PM	SiCl4 pre valve closed
2/1/2011	2:43:21 PM	SiCl4 post valve closed
2/1/2011	2:43:21 PM	Main Vac valve closed
2/1/2011	2:43:21 PM	Bypass valve closed
2/1/2011	2:43:21 PM	H2 valve opened
2/1/2011	2:43:21 PM	Bubbler valve opened
2/1/2011	2:43:21 PM	Helium MFC set to  0.000000
2/1/2011	2:43:21 PM	H2 MFC set to  400.000000
2/1/2011	2:43:21 PM	BCl3 MFC set to  0.000000
2/1/2011	2:43:21 PM	PHl3 MFC set to  0.000000
2/1/2011	2:43:21 PM	SiCl4 MFC set to  0.000000
2/1/2011	2:43:21 PM	Bypass solenoid MFC set to  0.000000
2/1/2011	2:43:21 PM	Tube furnace set to 1000
2/1/2011	2:48:21 PM	Helium valve closed
2/1/2011	2:48:21 PM	PH3 valve closed
2/1/2011	2:48:21 PM	Main Vac valve closed
2/1/2011	2:48:21 PM	Bypass valve closed
2/1/2011	2:48:21 PM	H2 valve opened
2/1/2011	2:48:21 PM	BCl3 valve opened
2/1/2011	2:48:21 PM	SiCl4 pre valve opened
2/1/2011	2:48:21 PM	SiCl4 post valve opened
2/1/2011	2:48:21 PM	Bubbler valve opened
2/1/2011	2:48:21 PM	Helium MFC set to  0.000000
2/1/2011	2:48:21 PM	H2 MFC set to  400.000000
2/1/2011	2:48:21 PM	BCl3 MFC set to  3.000000
2/1/2011	2:48:21 PM	PHl3 MFC set to  0.000000
2/1/2011	2:48:21 PM	SiCl4 MFC set to  40.000000
2/1/2011	2:48:21 PM	Bypass solenoid MFC set to  0.000000
2/1/2011	2:48:21 PM	Tube furnace set to 1000
2/1/2011	3:12:21 PM	Helium valve closed
2/1/2011	3:12:21 PM	BCl3 valve closed
2/1/2011	3:12:21 PM	PH3 valve closed
2/1/2011	3:12:21 PM	SiCl4 pre valve closed
2/1/2011	3:12:21 PM	SiCl4 post valve closed
2/1/2011	3:12:21 PM	Main Vac valve closed
2/1/2011	3:12:21 PM	Bypass valve closed
2/1/2011	3:12:21 PM	H2 valve opened
2/1/2011	3:12:21 PM	Bubbler valve opened
2/1/2011	3:12:21 PM	Helium MFC set to  0.000000
2/1/2011	3:12:21 PM	H2 MFC set to  500.000000
2/1/2011	3:12:21 PM	BCl3 MFC set to  0.000000
2/1/2011	3:12:21 PM	PHl3 MFC set to  0.000000
2/1/2011	3:12:21 PM	SiCl4 MFC set to  0.000000
2/1/2011	3:12:21 PM	Bypass solenoid MFC set to  0.000000
2/1/2011	3:12:22 PM	Tube furnace set to 0
2/1/2011	3:12:42 PM	H2 valve closed
2/1/2011	3:12:42 PM	BCl3 valve closed
2/1/2011	3:12:42 PM	PH3 valve closed
2/1/2011	3:12:42 PM	SiCl4 pre valve closed
2/1/2011	3:12:42 PM	SiCl4 post valve closed
2/1/2011	3:12:42 PM	Main Vac valve closed
2/1/2011	3:12:42 PM	Bypass valve closed
2/1/2011	3:12:42 PM	Helium valve opened
2/1/2011	3:12:42 PM	Bubbler valve opened
2/1/2011	3:12:42 PM	Helium MFC set to  400.000000
2/1/2011	3:12:42 PM	H2 MFC set to  0.000000
2/1/2011	3:12:42 PM	BCl3 MFC set to  0.000000
2/1/2011	3:12:42 PM	PHl3 MFC set to  0.000000
2/1/2011	3:12:42 PM	SiCl4 MFC set to  0.000000
2/1/2011	3:12:42 PM	Bypass solenoid MFC set to  0.000000
2/1/2011	3:12:42 PM	Tube furnace set to 0
2/1/2011	3:32:42 PM	Helium valve closed
2/1/2011	3:32:42 PM	H2 valve closed
2/1/2011	3:32:42 PM	BCl3 valve closed
2/1/2011	3:32:42 PM	PH3 valve closed
2/1/2011	3:32:42 PM	SiCl4 pre valve closed
2/1/2011	3:32:42 PM	SiCl4 post valve closed
2/1/2011	3:32:42 PM	Main Vac valve closed
2/1/2011	3:32:42 PM	Bypass valve closed
2/1/2011	3:32:42 PM	Bubbler valve closed
2/1/2011	3:32:42 PM	Helium MFC set to  0.000000
2/1/2011	3:32:42 PM	H2 MFC set to  0.000000
2/1/2011	3:32:42 PM	BCl3 MFC set to  0.000000
2/1/2011	3:32:42 PM	PHl3 MFC set to  0.000000
2/1/2011	3:32:42 PM	SiCl4 MFC set to  0.000000
2/1/2011	3:32:42 PM	Bypass solenoid MFC set to  0.000000
2/1/2011	3:32:42 PM	Tube furnace set to 0
2/1/2011	3:32:42 PM	Run finished at 3:32 PM
2/1/2011	3:52:29 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
2/1/2011	3:52:41 PM	Recipe started at 3:52 PM
2/1/2011	3:52:41 PM	Helium valve closed
2/1/2011	3:52:41 PM	H2 valve closed
2/1/2011	3:52:41 PM	BCl3 valve closed
2/1/2011	3:52:41 PM	PH3 valve closed
2/1/2011	3:52:41 PM	SiCl4 pre valve closed
2/1/2011	3:52:41 PM	SiCl4 post valve closed
2/1/2011	3:52:41 PM	Main Vac valve closed
2/1/2011	3:52:41 PM	Bubbler valve closed
2/1/2011	3:52:41 PM	Bypass valve opened
2/1/2011	3:52:41 PM	Helium MFC set to  0.000000
2/1/2011	3:52:41 PM	H2 MFC set to  0.000000
2/1/2011	3:52:41 PM	BCl3 MFC set to  0.000000
2/1/2011	3:52:41 PM	PHl3 MFC set to  0.000000
2/1/2011	3:52:41 PM	SiCl4 MFC set to  0.000000
2/1/2011	3:52:41 PM	Bypass solenoid MFC set to  0.000000
2/1/2011	3:52:42 PM	Tube furnace set to 0
2/1/2011	3:53:13 PM	Helium valve closed
2/1/2011	3:53:13 PM	H2 valve closed
2/1/2011	3:53:13 PM	BCl3 valve closed
2/1/2011	3:53:13 PM	PH3 valve closed
2/1/2011	3:53:13 PM	SiCl4 pre valve closed
2/1/2011	3:53:13 PM	SiCl4 post valve closed
2/1/2011	3:53:13 PM	Bubbler valve closed
2/1/2011	3:53:13 PM	Main Vac valve opened
2/1/2011	3:53:13 PM	Bypass valve opened
2/1/2011	3:53:13 PM	Helium MFC set to  0.000000
2/1/2011	3:53:13 PM	H2 MFC set to  0.000000
2/1/2011	3:53:13 PM	BCl3 MFC set to  0.000000
2/1/2011	3:53:13 PM	PHl3 MFC set to  0.000000
2/1/2011	3:53:13 PM	SiCl4 MFC set to  0.000000
2/1/2011	3:53:13 PM	Bypass solenoid MFC set to  0.000000
2/1/2011	3:53:13 PM	Tube furnace set to 0
2/1/2011	3:54:13 PM	H2 valve closed
2/1/2011	3:54:13 PM	BCl3 valve closed
2/1/2011	3:54:13 PM	PH3 valve closed
2/1/2011	3:54:13 PM	SiCl4 pre valve closed
2/1/2011	3:54:13 PM	SiCl4 post valve closed
2/1/2011	3:54:13 PM	Bubbler valve closed
2/1/2011	3:54:13 PM	Helium valve opened
2/1/2011	3:54:13 PM	Main Vac valve opened
2/1/2011	3:54:13 PM	Bypass valve opened
2/1/2011	3:54:13 PM	Helium MFC set to  100.000000
2/1/2011	3:54:13 PM	H2 MFC set to  0.000000
2/1/2011	3:54:13 PM	BCl3 MFC set to  0.000000
2/1/2011	3:54:13 PM	PHl3 MFC set to  0.000000
2/1/2011	3:54:13 PM	SiCl4 MFC set to  0.000000
2/1/2011	3:54:13 PM	Bypass solenoid MFC set to  0.000000
2/1/2011	3:54:13 PM	Tube furnace set to 0
2/1/2011	3:55:13 PM	Helium valve closed
2/1/2011	3:55:13 PM	H2 valve closed
2/1/2011	3:55:13 PM	BCl3 valve closed
2/1/2011	3:55:13 PM	PH3 valve closed
2/1/2011	3:55:13 PM	SiCl4 pre valve closed
2/1/2011	3:55:13 PM	SiCl4 post valve closed
2/1/2011	3:55:13 PM	Bubbler valve closed
2/1/2011	3:55:13 PM	Main Vac valve opened
2/1/2011	3:55:13 PM	Bypass valve opened
2/1/2011	3:55:13 PM	Helium MFC set to  0.000000
2/1/2011	3:55:13 PM	H2 MFC set to  0.000000
2/1/2011	3:55:13 PM	BCl3 MFC set to  0.000000
2/1/2011	3:55:13 PM	PHl3 MFC set to  0.000000
2/1/2011	3:55:13 PM	SiCl4 MFC set to  0.000000
2/1/2011	3:55:13 PM	Bypass solenoid MFC set to  0.000000
2/1/2011	3:55:14 PM	Tube furnace set to 0
2/1/2011	3:56:14 PM	H2 valve closed
2/1/2011	3:56:14 PM	BCl3 valve closed
2/1/2011	3:56:14 PM	PH3 valve closed
2/1/2011	3:56:14 PM	SiCl4 pre valve closed
2/1/2011	3:56:14 PM	SiCl4 post valve closed
2/1/2011	3:56:14 PM	Bubbler valve closed
2/1/2011	3:56:14 PM	Helium valve opened
2/1/2011	3:56:14 PM	Main Vac valve opened
2/1/2011	3:56:14 PM	Bypass valve opened
2/1/2011	3:56:14 PM	Helium MFC set to  100.000000
2/1/2011	3:56:14 PM	H2 MFC set to  0.000000
2/1/2011	3:56:14 PM	BCl3 MFC set to  0.000000
2/1/2011	3:56:14 PM	PHl3 MFC set to  0.000000
2/1/2011	3:56:14 PM	SiCl4 MFC set to  0.000000
2/1/2011	3:56:14 PM	Bypass solenoid MFC set to  0.000000
2/1/2011	3:56:14 PM	Tube furnace set to 0
2/1/2011	3:57:14 PM	Helium valve closed
2/1/2011	3:57:14 PM	H2 valve closed
2/1/2011	3:57:14 PM	BCl3 valve closed
2/1/2011	3:57:14 PM	PH3 valve closed
2/1/2011	3:57:14 PM	SiCl4 pre valve closed
2/1/2011	3:57:14 PM	SiCl4 post valve closed
2/1/2011	3:57:14 PM	Bubbler valve closed
2/1/2011	3:57:14 PM	Main Vac valve opened
2/1/2011	3:57:14 PM	Bypass valve opened
2/1/2011	3:57:14 PM	Helium MFC set to  0.000000
2/1/2011	3:57:14 PM	H2 MFC set to  0.000000
2/1/2011	3:57:14 PM	BCl3 MFC set to  0.000000
2/1/2011	3:57:14 PM	PHl3 MFC set to  0.000000
2/1/2011	3:57:14 PM	SiCl4 MFC set to  0.000000
2/1/2011	3:57:14 PM	Bypass solenoid MFC set to  0.000000
2/1/2011	3:57:14 PM	Tube furnace set to 0
2/1/2011	3:58:14 PM	H2 valve closed
2/1/2011	3:58:14 PM	BCl3 valve closed
2/1/2011	3:58:14 PM	PH3 valve closed
2/1/2011	3:58:14 PM	SiCl4 pre valve closed
2/1/2011	3:58:14 PM	SiCl4 post valve closed
2/1/2011	3:58:14 PM	Bubbler valve closed
2/1/2011	3:58:14 PM	Helium valve opened
2/1/2011	3:58:14 PM	Main Vac valve opened
2/1/2011	3:58:14 PM	Bypass valve opened
2/1/2011	3:58:14 PM	Helium MFC set to  100.000000
2/1/2011	3:58:14 PM	H2 MFC set to  0.000000
2/1/2011	3:58:14 PM	BCl3 MFC set to  0.000000
2/1/2011	3:58:14 PM	PHl3 MFC set to  0.000000
2/1/2011	3:58:14 PM	SiCl4 MFC set to  0.000000
2/1/2011	3:58:14 PM	Bypass solenoid MFC set to  0.000000
2/1/2011	3:58:14 PM	Tube furnace set to 0
2/1/2011	3:59:14 PM	Helium valve closed
2/1/2011	3:59:14 PM	H2 valve closed
2/1/2011	3:59:14 PM	BCl3 valve closed
2/1/2011	3:59:14 PM	PH3 valve closed
2/1/2011	3:59:14 PM	SiCl4 pre valve closed
2/1/2011	3:59:14 PM	SiCl4 post valve closed
2/1/2011	3:59:14 PM	Bubbler valve closed
2/1/2011	3:59:14 PM	Main Vac valve opened
2/1/2011	3:59:14 PM	Bypass valve opened
2/1/2011	3:59:14 PM	Helium MFC set to  0.000000
2/1/2011	3:59:14 PM	H2 MFC set to  0.000000
2/1/2011	3:59:14 PM	BCl3 MFC set to  0.000000
2/1/2011	3:59:14 PM	PHl3 MFC set to  0.000000
2/1/2011	3:59:14 PM	SiCl4 MFC set to  0.000000
2/1/2011	3:59:14 PM	Bypass solenoid MFC set to  0.000000
2/1/2011	3:59:14 PM	Tube furnace set to 0
2/1/2011	4:00:14 PM	H2 valve closed
2/1/2011	4:00:14 PM	BCl3 valve closed
2/1/2011	4:00:14 PM	PH3 valve closed
2/1/2011	4:00:14 PM	SiCl4 pre valve closed
2/1/2011	4:00:14 PM	SiCl4 post valve closed
2/1/2011	4:00:14 PM	Bubbler valve closed
2/1/2011	4:00:14 PM	Helium valve opened
2/1/2011	4:00:14 PM	Main Vac valve opened
2/1/2011	4:00:14 PM	Bypass valve opened
2/1/2011	4:00:14 PM	Helium MFC set to  100.000000
2/1/2011	4:00:14 PM	H2 MFC set to  0.000000
2/1/2011	4:00:14 PM	BCl3 MFC set to  0.000000
2/1/2011	4:00:14 PM	PHl3 MFC set to  0.000000
2/1/2011	4:00:14 PM	SiCl4 MFC set to  0.000000
2/1/2011	4:00:14 PM	Bypass solenoid MFC set to  0.000000
2/1/2011	4:00:15 PM	Tube furnace set to 0
2/1/2011	4:01:15 PM	Helium valve closed
2/1/2011	4:01:15 PM	H2 valve closed
2/1/2011	4:01:15 PM	BCl3 valve closed
2/1/2011	4:01:15 PM	PH3 valve closed
2/1/2011	4:01:15 PM	SiCl4 pre valve closed
2/1/2011	4:01:15 PM	SiCl4 post valve closed
2/1/2011	4:01:15 PM	Bubbler valve closed
2/1/2011	4:01:15 PM	Main Vac valve opened
2/1/2011	4:01:15 PM	Bypass valve opened
2/1/2011	4:01:15 PM	Helium MFC set to  0.000000
2/1/2011	4:01:15 PM	H2 MFC set to  0.000000
2/1/2011	4:01:15 PM	BCl3 MFC set to  0.000000
2/1/2011	4:01:15 PM	PHl3 MFC set to  0.000000
2/1/2011	4:01:15 PM	SiCl4 MFC set to  0.000000
2/1/2011	4:01:15 PM	Bypass solenoid MFC set to  0.000000
2/1/2011	4:01:15 PM	Tube furnace set to 0
2/1/2011	4:02:15 PM	H2 valve closed
2/1/2011	4:02:15 PM	BCl3 valve closed
2/1/2011	4:02:15 PM	PH3 valve closed
2/1/2011	4:02:15 PM	SiCl4 pre valve closed
2/1/2011	4:02:15 PM	SiCl4 post valve closed
2/1/2011	4:02:15 PM	Bubbler valve closed
2/1/2011	4:02:15 PM	Helium valve opened
2/1/2011	4:02:15 PM	Main Vac valve opened
2/1/2011	4:02:15 PM	Bypass valve opened
2/1/2011	4:02:15 PM	Helium MFC set to  100.000000
2/1/2011	4:02:15 PM	H2 MFC set to  0.000000
2/1/2011	4:02:15 PM	BCl3 MFC set to  0.000000
2/1/2011	4:02:15 PM	PHl3 MFC set to  0.000000
2/1/2011	4:02:15 PM	SiCl4 MFC set to  0.000000
2/1/2011	4:02:15 PM	Bypass solenoid MFC set to  0.000000
2/1/2011	4:02:15 PM	Tube furnace set to 0
2/1/2011	4:03:15 PM	Helium valve closed
2/1/2011	4:03:15 PM	H2 valve closed
2/1/2011	4:03:15 PM	BCl3 valve closed
2/1/2011	4:03:15 PM	PH3 valve closed
2/1/2011	4:03:15 PM	SiCl4 pre valve closed
2/1/2011	4:03:15 PM	SiCl4 post valve closed
2/1/2011	4:03:15 PM	Bubbler valve closed
2/1/2011	4:03:15 PM	Main Vac valve opened
2/1/2011	4:03:15 PM	Bypass valve opened
2/1/2011	4:03:15 PM	Helium MFC set to  0.000000
2/1/2011	4:03:15 PM	H2 MFC set to  0.000000
2/1/2011	4:03:15 PM	BCl3 MFC set to  0.000000
2/1/2011	4:03:15 PM	PHl3 MFC set to  0.000000
2/1/2011	4:03:15 PM	SiCl4 MFC set to  0.000000
2/1/2011	4:03:15 PM	Bypass solenoid MFC set to  0.000000
2/1/2011	4:03:15 PM	Tube furnace set to 0
2/1/2011	4:04:15 PM	H2 valve closed
2/1/2011	4:04:15 PM	BCl3 valve closed
2/1/2011	4:04:15 PM	PH3 valve closed
2/1/2011	4:04:15 PM	SiCl4 pre valve closed
2/1/2011	4:04:15 PM	SiCl4 post valve closed
2/1/2011	4:04:15 PM	Bubbler valve closed
2/1/2011	4:04:15 PM	Helium valve opened
2/1/2011	4:04:15 PM	Main Vac valve opened
2/1/2011	4:04:15 PM	Bypass valve opened
2/1/2011	4:04:15 PM	Helium MFC set to  100.000000
2/1/2011	4:04:15 PM	H2 MFC set to  0.000000
2/1/2011	4:04:15 PM	BCl3 MFC set to  0.000000
2/1/2011	4:04:15 PM	PHl3 MFC set to  0.000000
2/1/2011	4:04:15 PM	SiCl4 MFC set to  0.000000
2/1/2011	4:04:15 PM	Bypass solenoid MFC set to  0.000000
2/1/2011	4:04:15 PM	Tube furnace set to 0
2/1/2011	4:05:15 PM	Helium valve closed
2/1/2011	4:05:15 PM	H2 valve closed
2/1/2011	4:05:15 PM	BCl3 valve closed
2/1/2011	4:05:15 PM	PH3 valve closed
2/1/2011	4:05:15 PM	SiCl4 pre valve closed
2/1/2011	4:05:15 PM	SiCl4 post valve closed
2/1/2011	4:05:15 PM	Bubbler valve closed
2/1/2011	4:05:15 PM	Main Vac valve opened
2/1/2011	4:05:15 PM	Bypass valve opened
2/1/2011	4:05:15 PM	Helium MFC set to  0.000000
2/1/2011	4:05:15 PM	H2 MFC set to  0.000000
2/1/2011	4:05:15 PM	BCl3 MFC set to  0.000000
2/1/2011	4:05:15 PM	PHl3 MFC set to  0.000000
2/1/2011	4:05:15 PM	SiCl4 MFC set to  0.000000
2/1/2011	4:05:15 PM	Bypass solenoid MFC set to  0.000000
2/1/2011	4:05:16 PM	Tube furnace set to 0
2/1/2011	4:06:16 PM	H2 valve closed
2/1/2011	4:06:16 PM	BCl3 valve closed
2/1/2011	4:06:16 PM	PH3 valve closed
2/1/2011	4:06:16 PM	SiCl4 pre valve closed
2/1/2011	4:06:16 PM	SiCl4 post valve closed
2/1/2011	4:06:16 PM	Bubbler valve closed
2/1/2011	4:06:16 PM	Helium valve opened
2/1/2011	4:06:16 PM	Main Vac valve opened
2/1/2011	4:06:16 PM	Bypass valve opened
2/1/2011	4:06:16 PM	Helium MFC set to  100.000000
2/1/2011	4:06:16 PM	H2 MFC set to  0.000000
2/1/2011	4:06:16 PM	BCl3 MFC set to  0.000000
2/1/2011	4:06:16 PM	PHl3 MFC set to  0.000000
2/1/2011	4:06:16 PM	SiCl4 MFC set to  0.000000
2/1/2011	4:06:16 PM	Bypass solenoid MFC set to  0.000000
2/1/2011	4:06:16 PM	Tube furnace set to 0
2/1/2011	4:07:16 PM	Helium valve closed
2/1/2011	4:07:16 PM	H2 valve closed
2/1/2011	4:07:16 PM	BCl3 valve closed
2/1/2011	4:07:16 PM	PH3 valve closed
2/1/2011	4:07:16 PM	SiCl4 pre valve closed
2/1/2011	4:07:16 PM	SiCl4 post valve closed
2/1/2011	4:07:16 PM	Bubbler valve closed
2/1/2011	4:07:16 PM	Main Vac valve opened
2/1/2011	4:07:16 PM	Bypass valve opened
2/1/2011	4:07:16 PM	Helium MFC set to  0.000000
2/1/2011	4:07:16 PM	H2 MFC set to  0.000000
2/1/2011	4:07:16 PM	BCl3 MFC set to  0.000000
2/1/2011	4:07:16 PM	PHl3 MFC set to  0.000000
2/1/2011	4:07:16 PM	SiCl4 MFC set to  0.000000
2/1/2011	4:07:16 PM	Bypass solenoid MFC set to  0.000000
2/1/2011	4:07:16 PM	Tube furnace set to 0
2/1/2011	4:08:16 PM	H2 valve closed
2/1/2011	4:08:16 PM	BCl3 valve closed
2/1/2011	4:08:16 PM	PH3 valve closed
2/1/2011	4:08:16 PM	SiCl4 pre valve closed
2/1/2011	4:08:16 PM	SiCl4 post valve closed
2/1/2011	4:08:16 PM	Bubbler valve closed
2/1/2011	4:08:16 PM	Helium valve opened
2/1/2011	4:08:16 PM	Main Vac valve opened
2/1/2011	4:08:16 PM	Bypass valve opened
2/1/2011	4:08:16 PM	Helium MFC set to  100.000000
2/1/2011	4:08:16 PM	H2 MFC set to  0.000000
2/1/2011	4:08:16 PM	BCl3 MFC set to  0.000000
2/1/2011	4:08:16 PM	PHl3 MFC set to  0.000000
2/1/2011	4:08:16 PM	SiCl4 MFC set to  0.000000
2/1/2011	4:08:16 PM	Bypass solenoid MFC set to  0.000000
2/1/2011	4:08:16 PM	Tube furnace set to 0
2/1/2011	4:09:16 PM	Helium valve closed
2/1/2011	4:09:16 PM	H2 valve closed
2/1/2011	4:09:16 PM	BCl3 valve closed
2/1/2011	4:09:16 PM	PH3 valve closed
2/1/2011	4:09:16 PM	SiCl4 pre valve closed
2/1/2011	4:09:16 PM	SiCl4 post valve closed
2/1/2011	4:09:16 PM	Bubbler valve closed
2/1/2011	4:09:16 PM	Main Vac valve opened
2/1/2011	4:09:16 PM	Bypass valve opened
2/1/2011	4:09:16 PM	Helium MFC set to  0.000000
2/1/2011	4:09:16 PM	H2 MFC set to  0.000000
2/1/2011	4:09:16 PM	BCl3 MFC set to  0.000000
2/1/2011	4:09:16 PM	PHl3 MFC set to  0.000000
2/1/2011	4:09:16 PM	SiCl4 MFC set to  0.000000
2/1/2011	4:09:16 PM	Bypass solenoid MFC set to  0.000000
2/1/2011	4:09:16 PM	Tube furnace set to 0
2/1/2011	4:10:16 PM	H2 valve closed
2/1/2011	4:10:16 PM	BCl3 valve closed
2/1/2011	4:10:16 PM	PH3 valve closed
2/1/2011	4:10:16 PM	SiCl4 pre valve closed
2/1/2011	4:10:16 PM	SiCl4 post valve closed
2/1/2011	4:10:16 PM	Bubbler valve closed
2/1/2011	4:10:16 PM	Helium valve opened
2/1/2011	4:10:16 PM	Main Vac valve opened
2/1/2011	4:10:16 PM	Bypass valve opened
2/1/2011	4:10:16 PM	Helium MFC set to  100.000000
2/1/2011	4:10:16 PM	H2 MFC set to  0.000000
2/1/2011	4:10:16 PM	BCl3 MFC set to  0.000000
2/1/2011	4:10:16 PM	PHl3 MFC set to  0.000000
2/1/2011	4:10:16 PM	SiCl4 MFC set to  0.000000
2/1/2011	4:10:16 PM	Bypass solenoid MFC set to  0.000000
2/1/2011	4:10:17 PM	Tube furnace set to 0
2/1/2011	4:11:17 PM	Helium valve closed
2/1/2011	4:11:17 PM	H2 valve closed
2/1/2011	4:11:17 PM	BCl3 valve closed
2/1/2011	4:11:17 PM	PH3 valve closed
2/1/2011	4:11:17 PM	SiCl4 pre valve closed
2/1/2011	4:11:17 PM	SiCl4 post valve closed
2/1/2011	4:11:17 PM	Bubbler valve closed
2/1/2011	4:11:17 PM	Main Vac valve opened
2/1/2011	4:11:17 PM	Bypass valve opened
2/1/2011	4:11:17 PM	Helium MFC set to  0.000000
2/1/2011	4:11:17 PM	H2 MFC set to  0.000000
2/1/2011	4:11:17 PM	BCl3 MFC set to  0.000000
2/1/2011	4:11:17 PM	PHl3 MFC set to  0.000000
2/1/2011	4:11:17 PM	SiCl4 MFC set to  0.000000
2/1/2011	4:11:17 PM	Bypass solenoid MFC set to  0.000000
2/1/2011	4:11:17 PM	Tube furnace set to 0
2/1/2011	4:12:17 PM	H2 valve closed
2/1/2011	4:12:17 PM	BCl3 valve closed
2/1/2011	4:12:17 PM	PH3 valve closed
2/1/2011	4:12:17 PM	SiCl4 pre valve closed
2/1/2011	4:12:17 PM	SiCl4 post valve closed
2/1/2011	4:12:17 PM	Bubbler valve closed
2/1/2011	4:12:17 PM	Helium valve opened
2/1/2011	4:12:17 PM	Main Vac valve opened
2/1/2011	4:12:17 PM	Bypass valve opened
2/1/2011	4:12:17 PM	Helium MFC set to  100.000000
2/1/2011	4:12:17 PM	H2 MFC set to  0.000000
2/1/2011	4:12:17 PM	BCl3 MFC set to  0.000000
2/1/2011	4:12:17 PM	PHl3 MFC set to  0.000000
2/1/2011	4:12:17 PM	SiCl4 MFC set to  0.000000
2/1/2011	4:12:17 PM	Bypass solenoid MFC set to  0.000000
2/1/2011	4:12:17 PM	Tube furnace set to 0
2/1/2011	4:13:17 PM	Helium valve closed
2/1/2011	4:13:17 PM	H2 valve closed
2/1/2011	4:13:17 PM	BCl3 valve closed
2/1/2011	4:13:17 PM	PH3 valve closed
2/1/2011	4:13:17 PM	SiCl4 pre valve closed
2/1/2011	4:13:17 PM	SiCl4 post valve closed
2/1/2011	4:13:17 PM	Bubbler valve closed
2/1/2011	4:13:17 PM	Main Vac valve opened
2/1/2011	4:13:17 PM	Bypass valve opened
2/1/2011	4:13:17 PM	Helium MFC set to  0.000000
2/1/2011	4:13:17 PM	H2 MFC set to  0.000000
2/1/2011	4:13:17 PM	BCl3 MFC set to  0.000000
2/1/2011	4:13:17 PM	PHl3 MFC set to  0.000000
2/1/2011	4:13:17 PM	SiCl4 MFC set to  0.000000
2/1/2011	4:13:17 PM	Bypass solenoid MFC set to  0.000000
2/1/2011	4:13:17 PM	Tube furnace set to 0
2/1/2011	4:13:18 PM	Run finished at 4:13 PM
2/1/2011	4:13:18 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
2/1/2011	4:35:00 PM	Recipe started at 4:34 PM
2/1/2011	4:35:01 PM	Helium valve closed
2/1/2011	4:35:01 PM	BCl3 valve closed
2/1/2011	4:35:01 PM	PH3 valve closed
2/1/2011	4:35:01 PM	SiCl4 pre valve closed
2/1/2011	4:35:01 PM	SiCl4 post valve closed
2/1/2011	4:35:01 PM	Main Vac valve closed
2/1/2011	4:35:01 PM	Bypass valve closed
2/1/2011	4:35:01 PM	Bubbler valve closed
2/1/2011	4:35:01 PM	H2 valve opened
2/1/2011	4:35:01 PM	Helium MFC set to  0.000000
2/1/2011	4:35:01 PM	H2 MFC set to  500.000000
2/1/2011	4:35:01 PM	BCl3 MFC set to  0.000000
2/1/2011	4:35:01 PM	PHl3 MFC set to  0.000000
2/1/2011	4:35:01 PM	SiCl4 MFC set to  0.000000
2/1/2011	4:35:01 PM	Bypass solenoid MFC set to  0.000000
2/1/2011	4:35:01 PM	Tube furnace set to 200
2/1/2011	4:36:18 PM	Helium valve closed
2/1/2011	4:36:18 PM	BCl3 valve closed
2/1/2011	4:36:18 PM	PH3 valve closed
2/1/2011	4:36:18 PM	SiCl4 pre valve closed
2/1/2011	4:36:18 PM	SiCl4 post valve closed
2/1/2011	4:36:18 PM	Main Vac valve closed
2/1/2011	4:36:18 PM	Bypass valve closed
2/1/2011	4:36:18 PM	H2 valve opened
2/1/2011	4:36:18 PM	Bubbler valve opened
2/1/2011	4:36:18 PM	Helium MFC set to  0.000000
2/1/2011	4:36:18 PM	H2 MFC set to  400.000000
2/1/2011	4:36:18 PM	BCl3 MFC set to  0.000000
2/1/2011	4:36:18 PM	PHl3 MFC set to  0.000000
2/1/2011	4:36:18 PM	SiCl4 MFC set to  0.000000
2/1/2011	4:36:18 PM	Bypass solenoid MFC set to  0.000000
2/1/2011	4:36:18 PM	Tube furnace set to 1002
2/1/2011	4:52:18 PM	Helium valve closed
2/1/2011	4:52:18 PM	BCl3 valve closed
2/1/2011	4:52:18 PM	PH3 valve closed
2/1/2011	4:52:18 PM	SiCl4 pre valve closed
2/1/2011	4:52:18 PM	SiCl4 post valve closed
2/1/2011	4:52:18 PM	Main Vac valve closed
2/1/2011	4:52:18 PM	Bypass valve closed
2/1/2011	4:52:18 PM	H2 valve opened
2/1/2011	4:52:18 PM	Bubbler valve opened
2/1/2011	4:52:18 PM	Helium MFC set to  0.000000
2/1/2011	4:52:18 PM	H2 MFC set to  400.000000
2/1/2011	4:52:18 PM	BCl3 MFC set to  0.000000
2/1/2011	4:52:18 PM	PHl3 MFC set to  0.000000
2/1/2011	4:52:18 PM	SiCl4 MFC set to  0.000000
2/1/2011	4:52:18 PM	Bypass solenoid MFC set to  0.000000
2/1/2011	4:52:18 PM	Tube furnace set to 1000
2/1/2011	4:57:18 PM	Helium valve closed
2/1/2011	4:57:18 PM	PH3 valve closed
2/1/2011	4:57:18 PM	Main Vac valve closed
2/1/2011	4:57:18 PM	Bypass valve closed
2/1/2011	4:57:18 PM	H2 valve opened
2/1/2011	4:57:18 PM	BCl3 valve opened
2/1/2011	4:57:18 PM	SiCl4 pre valve opened
2/1/2011	4:57:18 PM	SiCl4 post valve opened
2/1/2011	4:57:18 PM	Bubbler valve opened
2/1/2011	4:57:18 PM	Helium MFC set to  0.000000
2/1/2011	4:57:18 PM	H2 MFC set to  400.000000
2/1/2011	4:57:18 PM	BCl3 MFC set to  3.000000
2/1/2011	4:57:18 PM	PHl3 MFC set to  0.000000
2/1/2011	4:57:18 PM	SiCl4 MFC set to  40.000000
2/1/2011	4:57:18 PM	Bypass solenoid MFC set to  0.000000
2/1/2011	4:57:19 PM	Tube furnace set to 1000
2/1/2011	5:21:18 PM	Helium valve closed
2/1/2011	5:21:18 PM	BCl3 valve closed
2/1/2011	5:21:18 PM	PH3 valve closed
2/1/2011	5:21:18 PM	SiCl4 pre valve closed
2/1/2011	5:21:18 PM	SiCl4 post valve closed
2/1/2011	5:21:18 PM	Main Vac valve closed
2/1/2011	5:21:18 PM	Bypass valve closed
2/1/2011	5:21:18 PM	H2 valve opened
2/1/2011	5:21:18 PM	Bubbler valve opened
2/1/2011	5:21:18 PM	Helium MFC set to  0.000000
2/1/2011	5:21:18 PM	H2 MFC set to  500.000000
2/1/2011	5:21:18 PM	BCl3 MFC set to  0.000000
2/1/2011	5:21:18 PM	PHl3 MFC set to  0.000000
2/1/2011	5:21:18 PM	SiCl4 MFC set to  0.000000
2/1/2011	5:21:18 PM	Bypass solenoid MFC set to  0.000000
2/1/2011	5:21:19 PM	Tube furnace set to 0
2/1/2011	5:21:39 PM	H2 valve closed
2/1/2011	5:21:39 PM	BCl3 valve closed
2/1/2011	5:21:39 PM	PH3 valve closed
2/1/2011	5:21:39 PM	SiCl4 pre valve closed
2/1/2011	5:21:39 PM	SiCl4 post valve closed
2/1/2011	5:21:39 PM	Main Vac valve closed
2/1/2011	5:21:39 PM	Bypass valve closed
2/1/2011	5:21:39 PM	Helium valve opened
2/1/2011	5:21:39 PM	Bubbler valve opened
2/1/2011	5:21:39 PM	Helium MFC set to  400.000000
2/1/2011	5:21:39 PM	H2 MFC set to  0.000000
2/1/2011	5:21:39 PM	BCl3 MFC set to  0.000000
2/1/2011	5:21:39 PM	PHl3 MFC set to  0.000000
2/1/2011	5:21:39 PM	SiCl4 MFC set to  0.000000
2/1/2011	5:21:39 PM	Bypass solenoid MFC set to  0.000000
2/1/2011	5:21:39 PM	Tube furnace set to 0
2/1/2011	5:41:39 PM	Helium valve closed
2/1/2011	5:41:39 PM	H2 valve closed
2/1/2011	5:41:39 PM	BCl3 valve closed
2/1/2011	5:41:39 PM	PH3 valve closed
2/1/2011	5:41:39 PM	SiCl4 pre valve closed
2/1/2011	5:41:39 PM	SiCl4 post valve closed
2/1/2011	5:41:39 PM	Main Vac valve closed
2/1/2011	5:41:39 PM	Bypass valve closed
2/1/2011	5:41:39 PM	Bubbler valve closed
2/1/2011	5:41:39 PM	Helium MFC set to  0.000000
2/1/2011	5:41:39 PM	H2 MFC set to  0.000000
2/1/2011	5:41:39 PM	BCl3 MFC set to  0.000000
2/1/2011	5:41:39 PM	PHl3 MFC set to  0.000000
2/1/2011	5:41:39 PM	SiCl4 MFC set to  0.000000
2/1/2011	5:41:39 PM	Bypass solenoid MFC set to  0.000000
2/1/2011	5:41:39 PM	Tube furnace set to 0
2/1/2011	5:41:39 PM	Run finished at 5:41 PM
2/1/2011	6:48:31 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/1/2011	6:48:32 PM	Recipe started at 6:48 PM
2/1/2011	6:48:32 PM	H2 valve closed
2/1/2011	6:48:32 PM	BCl3 valve closed
2/1/2011	6:48:32 PM	PH3 valve closed
2/1/2011	6:48:32 PM	SiCl4 pre valve closed
2/1/2011	6:48:32 PM	SiCl4 post valve closed
2/1/2011	6:48:32 PM	Main Vac valve closed
2/1/2011	6:48:32 PM	Bypass valve closed
2/1/2011	6:48:32 PM	Bubbler valve closed
2/1/2011	6:48:32 PM	Helium valve opened
2/1/2011	6:48:32 PM	Helium MFC set to  500.000000
2/1/2011	6:48:32 PM	H2 MFC set to  0.000000
2/1/2011	6:48:32 PM	BCl3 MFC set to  0.000000
2/1/2011	6:48:32 PM	PHl3 MFC set to  0.000000
2/1/2011	6:48:32 PM	SiCl4 MFC set to  0.000000
2/1/2011	6:48:32 PM	Bypass solenoid MFC set to  0.000000
2/1/2011	6:48:32 PM	Tube furnace set to 0
2/1/2011	6:48:35 PM	Helium valve closed
2/1/2011	6:48:35 PM	H2 valve closed
2/1/2011	6:48:35 PM	BCl3 valve closed
2/1/2011	6:48:35 PM	PH3 valve closed
2/1/2011	6:48:35 PM	SiCl4 pre valve closed
2/1/2011	6:48:35 PM	SiCl4 post valve closed
2/1/2011	6:48:35 PM	Main Vac valve closed
2/1/2011	6:48:35 PM	Bypass valve closed
2/1/2011	6:48:35 PM	Bubbler valve closed
2/1/2011	6:48:35 PM	Helium MFC set to  0.000000
2/1/2011	6:48:35 PM	H2 MFC set to  0.000000
2/1/2011	6:48:35 PM	BCl3 MFC set to  0.000000
2/1/2011	6:48:35 PM	PHl3 MFC set to  0.000000
2/1/2011	6:48:35 PM	SiCl4 MFC set to  0.000000
2/1/2011	6:48:35 PM	Bypass solenoid MFC set to  0.000000
2/1/2011	6:48:36 PM	Tube furnace set to 0
2/1/2011	6:48:36 PM	Run finished at 6:48 PM
2/1/2011	6:48:36 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/1/2011	6:50:50 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/1/2011	6:50:51 PM	Recipe started at 6:50 PM
2/1/2011	6:50:51 PM	Helium valve closed
2/1/2011	6:50:51 PM	H2 valve closed
2/1/2011	6:50:51 PM	BCl3 valve closed
2/1/2011	6:50:51 PM	PH3 valve closed
2/1/2011	6:50:51 PM	SiCl4 pre valve closed
2/1/2011	6:50:51 PM	SiCl4 post valve closed
2/1/2011	6:50:51 PM	Main Vac valve closed
2/1/2011	6:50:51 PM	Bubbler valve closed
2/1/2011	6:50:51 PM	Bypass valve opened
2/1/2011	6:50:51 PM	Helium MFC set to  0.000000
2/1/2011	6:50:51 PM	H2 MFC set to  0.000000
2/1/2011	6:50:51 PM	BCl3 MFC set to  0.000000
2/1/2011	6:50:51 PM	PHl3 MFC set to  0.000000
2/1/2011	6:50:51 PM	SiCl4 MFC set to  0.000000
2/1/2011	6:50:51 PM	Bypass solenoid MFC set to  0.000000
2/1/2011	6:50:51 PM	Tube furnace set to 0
2/1/2011	6:51:20 PM	Helium valve closed
2/1/2011	6:51:20 PM	H2 valve closed
2/1/2011	6:51:20 PM	BCl3 valve closed
2/1/2011	6:51:20 PM	PH3 valve closed
2/1/2011	6:51:20 PM	SiCl4 pre valve closed
2/1/2011	6:51:20 PM	SiCl4 post valve closed
2/1/2011	6:51:20 PM	Bubbler valve closed
2/1/2011	6:51:20 PM	Main Vac valve opened
2/1/2011	6:51:20 PM	Bypass valve opened
2/1/2011	6:51:20 PM	Helium MFC set to  0.000000
2/1/2011	6:51:20 PM	H2 MFC set to  0.000000
2/1/2011	6:51:20 PM	BCl3 MFC set to  0.000000
2/1/2011	6:51:20 PM	PHl3 MFC set to  0.000000
2/1/2011	6:51:20 PM	SiCl4 MFC set to  0.000000
2/1/2011	6:51:20 PM	Bypass solenoid MFC set to  0.000000
2/1/2011	6:51:21 PM	Tube furnace set to 0
2/1/2011	6:51:21 PM	Run finished at 6:51 PM
2/1/2011	6:51:21 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
